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SEC-Z500 - Horiba · マルチガス，マルチレンジ対応マスフローコントローラ...
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8 No.28 March 2004 SEC-Z500 300 mm SEC-Z500 1 SEMI 2787.1 2 3 4 5 MFC 1 MFC MFC 1990 MFC SEC-Z500 MFC MFC MFC SEC-Z500 SEC-Z500 MFC MFC 1 SEMI 2787.1 MFC VCR 1 IGS 2 106 mm 124 mm 2 79.8 mm 37.6 mm 92 mm 28.5 mm 2 4 SEMI 2787.1 1 1 VCR Swagelok 2 IGS Integrated Gas System
Transcript of SEC-Z500 - Horiba · マルチガス，マルチレンジ対応マスフローコントローラ...
8 No.28 March 2004
SEC-Z500
300 mm
SEC-Z500 1 SEMI2787.1 2 3
4 5
MFC1
MFCMFC 1990
MFCSEC-Z500
MFC
MFC
MFC SEC-Z500
SEC-Z500
MFC
MFC
1 SEMI 2787.1
MFCVCR 1 IGS 2
106 mm124 mm 2
79.8 mm37.6 mm
92 mm 28.5 mm2 4
S E M I2787.1
1
1 VCR Swagelok2 IGS Integrated Gas System
Technical Reports
9
1
28.6 mm 28.6 mmVCR 1.125" 1.125"
124 mm 106 mm28.6 mm 38.1 mm
IGS 1.125" 1.5"92 mm 79.8 mm
SEC-Z500 4
1 SEC-Z500 VCR
1 VCR SEC-Z500
2 SEC-Z500 IGS
2 IGS SEC-Z500
2
MFC5 SCCM 3 10 SLM 4
150MFC
SEC-Z500MFC
MFC MFC
MFC
11 MFC5 SCCM 10 SLM
MFCMFC
3 SCCM mL/min 0°C, 101.3 kPa
4 SLM L/min 0°C, 101.3 kPa
SEC-Z500
10 No.28 March 2004
3
MFC
MFC ± 1 %F.S.
2 MFCMFC
SEC-Z500 Molbloc DHI
100 % 25 % 1 %S.P.25 % 2 % 0.25 %F.S.
1 M F C
3 1 %F.S.1 %S.P. 0.25 %F.S. %S.P.
0 %0
2.5
5
-5
-2.5
20 % 40 % 60 % 80 % 100 %
1 % F.S.
1 % S.P.
3 1 %S.P. 0.25 %F.S. 1 %F.S.
4
MFC
SEC-Z500
MFCPID
PID
1SEC-Z500 PID
PID
4 SEC-Z512 N2 10SLM
4
Technical Reports
11
5
MFCSEC-Z500
MFC
MFCMFC
MFC
SEC-Z500
SEC-Z500
Masami Nishikawa
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