Post on 26-Jan-2021
ECRナノカーボン膜の特性ECR Nano-Carbon Films
DiamondHardest Material
Low electrical conductivity
ECR – sputtered Carbon
Hardness: comparable to DiamondConductivity: 19 orders of magnitude
larger than Diamond
ECRスパッタカーボン膜の特長Characteristics of ECR–Sputtered Carbon Films
ダイヤモンドに匹敵する高い硬度High Hardness Comparable to Diamond's
0 50 100 150
1
10
100
200
Diamond
Acceleration voltage of ions (V)
ECR-sputtered Carbon Film
Mea
nW
ear
Dep
th (
nm) Lord: 80μN
Thickness:40nm
グラファイトに匹敵する電気伝導性High Electrical Conductivity Comparable to Graphite's
0 50 100 150 200
140
120
100
80
60
4020
0
-1
Room Temperature
Con
duct
ivit
y(Ω
cm
)
Acceleration voltage of ions (V)
Diamond : 1x10-18
Graphite :∥ c plane 1x10⊥ 1
ECR Carbon Film : 20-140
4
Room Temperature
電気伝導度Electrical Conductivity
(Ωcm)-1
Acceleration Voltage: 20V
結晶性カーボン膜Crystalline ECR Carbon Film
Acceleration Voltage: 85V
断面TEM像Cross-Sectional TEM View
Binding Energy (eV) Binding Energy (eV)
C1s XPS SpectraAcceleration Voltage: 20V Acceleration Voltage: 85V
ECRカーボン膜の結合状態Bonding State of ECR Carbon Film
0 20 40 60 80 100 120 140
1
0.8
0.6
0.4
0.2
0
Acceleration voltage of ions (V)
ECRカーボン膜の結合状態Bonding State of ECR Carbon Film
Increase in Acceleration Voltage
Layered Structure Assemble of connected carbon nano-tubes
Weak van der Waals Force Strong Covalent Binding ( sp2 and sp3 bonding)
硬さと電気伝導性の両立Compatible Characteristics of High Hardness and
High Electrical Conductivity
High Hardness comparable to Diamond
Connected carbon nanotube produce current paths.
ECR Carbon Film
パターニングが可能Patterning is Possible
Pin:SiC Φ=3.2mmW=3 N V=15mm/sec T=24.6-24.7 C RH=28-37%
低い摩擦係数Low Friction Coefficient
μ=0.09
0
2
4
6
8
10
12
14
0 5 10 15 20 25 30 35 40
80℃、80%RH
優れた耐湿度性Moisture-Resistant Property
DLC Film
ECR-sputtered Film
Mea
n W
ear
Dep
th (
nm)
Days
Acceleration Voltage 20V
Acceleration Voltage 85V
優れた耐熱性Heat Resistant Property
RF-sputtered Carbon Film
ECR-sputtered Carbon Film
0
50
100
150
200
250
0 200 400 600 800 1000Temperature ( oC)
Target potential region
; 1.5 ~ 2.0 V vs. Ag|AgCl
Bio-applicationDetection of nucleotide derivatives in high potential region by using ECR carbon film
7 10-5
6 10-5
5 10-5
4 10-5
3 10-5
2 10-5
1 10-5
0
-1 10-51 1.2 1.4 1.6 1.8 2
Glassy carbonECR carbon
E mV vs. Ag|AgCl
I / A
C-V curves of ECR carbon film and GC electrode in PBS (pH 7.4) containing 100 mM NaCl.
広い電位窓Wide Potential Window
ECR-carbon Surface
roughness;0.7Å!
Protein ⇒ No Adhesion
Continuous monitoring
Glassy Carbon Electrode : Sensitivity Deterioration due to adsorptionECR Carbon Electrode: No Adhesion ⇒ No Deterioration
原子レベルで平坦な表面Atomically Flat Surface
Sen
sor
curr
ent