ECRナノカーボン膜の特性ECR Nano-Carbon Films

DiamondHardest Material

Low electrical conductivity

ECR – sputtered Carbon

Hardness： comparable to DiamondConductivity： 19 orders of magnitude

larger than Diamond

ECRスパッタカーボン膜の特長Characteristics of ECR–Sputtered Carbon Films

ダイヤモンドに匹敵する高い硬度High Hardness Comparable to Diamond's

0 50 100 150

1

10

100

200

Diamond

Acceleration voltage of ions (V)

ECR-sputtered Carbon Film

Mea

nW

ear

Dep

th (

nm) Lord: 80μN

Thickness:40nm

グラファイトに匹敵する電気伝導性High Electrical Conductivity Comparable to Graphite's

0 50 100 150 200

140

120

100

80

60

4020

0

－１

Room Temperature

Con

duct

ivit

y（Ω

ｃｍ

）

Acceleration voltage of ions (V)

Diamond : 1x10-18

Graphite :∥ c plane 1x10⊥ 1

ECR Carbon Film ： 20-140

4

Room Temperature

電気伝導度Electrical Conductivity

(Ωcm)-1

Acceleration Voltage: 20V

結晶性カーボン膜Crystalline ECR Carbon Film

Acceleration Voltage: 85V

断面TEM像Cross-Sectional TEM View

Binding Energy (eV) Binding Energy (eV)

C1s XPS SpectraAcceleration Voltage: 20V Acceleration Voltage: 85V

ECRカーボン膜の結合状態Bonding State of ECR Carbon Film

0 20 40 60 80 100 120 140

1

0.8

0.6

0.4

0.2

0

Acceleration voltage of ions (V)

ECRカーボン膜の結合状態Bonding State of ECR Carbon Film

Increase in Acceleration Voltage

Layered Structure Assemble of connected carbon nano-tubes

Weak van der Waals Force Strong Covalent Binding ( sp2 and sp3 bonding)

硬さと電気伝導性の両立Compatible Characteristics of High Hardness and

High Electrical Conductivity

High Hardness comparable to Diamond

Connected carbon nanotube produce current paths.

ECR Carbon Film

パターニングが可能Patterning is Possible

Pin:SiC Φ=3.2mmW=3 N V=15mm/sec T=24.6-24.7 C RH=28-37%

低い摩擦係数Low Friction Coefficient

μ=0.09

0

2

4

6

8

10

12

14

0 5 10 15 20 25 30 35 40

８０℃、８０％ＲＨ

優れた耐湿度性Moisture-Resistant Property

DLC Film

ECR-sputtered Film

Mea

n W

ear

Dep

th (

nm)

Days

Acceleration Voltage 20V

Acceleration Voltage 85V

優れた耐熱性Heat Resistant Property

RF-sputtered Carbon Film

ECR-sputtered Carbon Film

0

50

100

150

200

250

0 200 400 600 800 1000Temperature ( oC)

Target potential region

; 1.5 ～ 2.0 V vs. Ag|AgCl

Bio-applicationDetection of nucleotide derivatives in high potential region by using ECR carbon film

7 10-5

6 10-5

5 10-5

4 10-5

3 10-5

2 10-5

1 10-5

0

-1 10-51 1.2 1.4 1.6 1.8 2

Glassy carbonECR carbon

E mV vs. Ag|AgCl

I / A

C-V curves of ECR carbon film and GC electrode in PBS (pH 7.4) containing 100 mM NaCl.

広い電位窓Wide Potential Window

ECR-carbon Surface

roughness；0.7Å！

Protein ⇒ No Adhesion

Continuous monitoring

Glassy Carbon Electrode : Sensitivity Deterioration due to adsorptionECR Carbon Electrode: No Adhesion ⇒ No Deterioration

原子レベルで平坦な表面Atomically Flat Surface

Sen

sor

curr

ent