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スズに埋め込まれたダイヤモンドによる研磨の FEM シミュレーション
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Transcript of スズに埋め込まれたダイヤモンドによる研磨の FEM シミュレーション
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FEM
2009626
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* 100 [nm] 1-2nm10NnN
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A) B) 21934 8340
*50 nmAB
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225nm125NiFeCu5:1FeMn*NiFe+CuE=193GPa, =0.309FeMnE=205GPa, =0.281
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Fe-Ni HAUSCH & WARLIMONT, "SINGLE CRYSTALLINE ELASTIC CONSTANTS OF FERROMAGNETIC FACE CENTERED CUBIC Fe-Ni INVAR ALLOYS, ACTA METALLURGICA 21 (1973) 401.Fe-Ni TANJI, NAKAGAWA & STEINEMANN, ANOMALOUS ELASTIC PROPERTIES OF Fe-Ni (fcc) ALLOYS AND THEIR INVAR PROPERTIES, Physica B 119 (1983) 109.Fe0.6Mn0.4Lenkkeri, "Measurements of elastic moduli of face-centred cubic alloys of transition metals, J. Phys. F: Metal Phys. 11 (1981) 1991.Cankurtaran et al., "Relationship of the elastic and nonlinear acoustic properties of the antiferromagnetic fcc Fe60Mn40 single-crystal alloy to Invar behavior," Phys. Rev. B 47 (1993) 3161.Kawald et al., "Anomalous temperature behaviour of the elastic constants of antiferromagnetic Mn-Invar alloys, J. Phys.: Condens. Matter 6 (1994) 9697.Fe0.5Mn0.5MEED Pan et al., "Stress oscillations and surface alloy formation during the growth of FeMn on Cu(001)," PHYSICAL REVIEW B 68, 224419 (2003).*
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Fe-NiFe0.5Ni0.515E=160GPa=0.317K=174GPa*Cu130GPa0.343
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Fe-MnFe60Mn40FeMnFeMnE/(1-)=148(5)GPaFe60Mn40=0.366FeMnE=94GPaK=117GPa*
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A1nm*1nm25nm50nm
10N
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A2nm*2nm25nm50nm1nm
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A*
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B1nm*
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FeNiFeMnfcc
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