- 1. Micro Robots Sumit Tripathi Saket Kansara
2. Outline
3. Introduction
- Programmable assembly of nm-scale (~ 1-100 nm){m-scale (~ 100
nm-100 m)} components either by manipulation with larger devices,
or by directed self-assembly.
- Design and fabrication of robots with overall dimensions at or
below the m range and made of nm-scale {m-scale} components.
- Programming and coordination of large numbers (swarms) of such
nanorobots.
4. FABRICATION
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- Polymer actuators( Polypyrrole (PPy) actuators):
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- Can be actuated in wet conditions or even in aqueous
solution.
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- Have reasonable energy consumption.
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- Easily deposited by electrochemical methods
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- Used to manufacture electrodes
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- Titanium adhesive alloy, high fracture energy(4500 J/m2 or
more)
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- Silicon substrate: capability of bonding between two surfaces
of same or different material
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- Assembly of aligned high density magnetic nanocores
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- Flexible characteristics along the normal to the tubes
axis
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- Biological proteins, bacteria etc.
Image: Berkeley University 5. Actuator-Rotary Nanomachine. The
central part of a rotary nanomachine.(Figure courtesy of Prof. B.
L. Feringas group (Univ of Groningen.)
- Power is supplied to these machines electrically, optically, or
chemically by feeding them with some given compound.
- Rotation due to orientation in favorable conformation
- Subject to continuous rotation
6. Drawbacks of molecular machines of This Kind
- Moving back and forth or rotating continuously
- Molecules used in these machines are not rigid
- Wavelength of light is much larger than an individual machine
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- Electrical control typically requires wire connections .
- The force/torque and energy characteristics have not been
investigated in detail.
Rotary Nanomachine. 7. Motor run byMycoplasma mobile Image
credit: Yuichi Hiratsuka, et al.
- Bacterium moves in search of protein rich regions.
- The bacteria bind to and pull the rotor.
- Move at speeds of up to 5 micrometers per second.
- Tracks are designed to coax the bacteria into moving in a
uniform direction around the circular tracks.
Protrusions 8. Motion of a Mycoplasma mobile -driven rotor .
Image credit: Yuichi Hiratsuka, et al.
- Chlamyodomonas :Swim toward light (phototaxis)
- Dictyostelium amoeba crawl toward a specific chemical substance
(chemotaxis).
Each rotor is 20 micrometers in diameter 9. Cantilever Sensors
Department of Physics and Physical Oceanography, Memorial
University, St. Johns, Newfoundland,Canada =Angle of
incidence=Azimuthal angle Ncis the surface normal to cantilever =
Angle of inclination of PSD 10. Cantilever Sensors
- Detect the deflection of a cantilever caused by surface
stresses
- Measure the shift in the resonance frequency of a vibrating
cantilever
- Inherent elastic instabilities at microscopic level
- Difficult to fabricate nanoscale cantilevers
Image:L. Nicu, M. Guirardel, Y. Tauran, and C. Bergaud (a)
cantilevers(b) bridges. Optical microscope images of SiNx: 11.
Micro-Electro-Mechanical-System
- Ability to navigate complex paths
12. The state transition diagram of USDA Bruce R. Donald ,
Member, IEEE , Christopher G. Levey , Member, IEEE , Craig D.
McGray , Member, IEEE , Igor Paprotny, and Daniela Rus 13.
Configuration Space Bruce R. Donald , Member, IEEE , Christopher G.
Levey , Member, IEEE , Craig D. McGray , Member, IEEE , Igor
Paprotny, and Daniela Rus 14. Steering Arm subsystem
- Cantilever beam 133 m long
- Controls direction by raising andlowering the arm
- Simultaneous operation with scratch drive
- Control in the form of oscillating voltages
Bruce R. Donald , Member, IEEE , Christopher G. Levey , Member,
IEEE , Craig D. McGray , Member, IEEE , Igor Paprotny, and Daniela
Rus 15. Control Waveforms
- Drive waveform actuates the robot
- Forward waveform lowers the device voltage
- Turning waveform increases the device voltage
Bruce R. Donald , Member, IEEE , Christopher G. Levey , Member,
IEEE , Craig D. McGray , Member, IEEE , Igor Paprotny, and Daniela
Rus 16. Power delivery mechanism
- Uses insulated electrodes on the silicon substrate
- Forms a capacitive circuit with scratch drive
- Actuator can receive consistent power in any direction and
position
- No need of position restricting wires
Bruce R. Donald , Member, IEEE , Christopher G. Levey , Member,
IEEE , Craig D. McGray , Member, IEEE , Igor Paprotny, and Daniela
Rus 17. Device Fabrication
- Surface micromachining process:
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- Consists of three layers of polycrystalline silicon, separated
by two layers of phosphosilicate glass.
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- The base of the steering arm is curled so that the tip of the
arm is approximately 7.5mhigher than the scratch drive plate
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- Layer of tensile chromium is deposited to create curvature
Bruce R. Donald , Member, IEEE , Christopher G. Levey , Member,
IEEE , Craig D. McGray , Member, IEEE , Igor Paprotny, and Daniela
Rus 18. Electrical Grids
- Consist of an array of metal electrodes on a silicon
substrate.
- Electrodes are insulated from the substrate by a 3mthicklayer
of thermal silica
- Coated with 0.5 of zirconium dioxide
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- High-impedance dielectric coupling
- Silicon wafers: oxidized for 20 h at 1100C in oxygen
- Wafers are patterned with the Metal pattern
- Three metal layers are evaporated onto the patterned
substrates
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- Middle layer consists ofgold-Conductive
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- Two layers of chromium-adhesion layers between the gold, the
oxidized substrate, and the zirconium dioxide
Bruce R. Donald , Member, IEEE , Christopher G. Levey , Member,
IEEE , Craig D. McGray , Member, IEEE , Igor Paprotny, and Daniela
Rus 19. Some Other Kinds
- Piezoelectric motors for mm Robots
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- Not required to support an air gap
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- Mechanical forces are generated by applying a voltage directly
across the piezoelectric film.
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- Ferroelectric thin films (typically 0.3-m), intense electric
fields can be established with fairly low voltages.
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- High torque to speed ratios.
- Robots Driven by external Magnetic fields Include a permanent
magnet
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- Can be remotely driven by external magnetic fields
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- Suitable for a mobile micro robot working in a closed
space.
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- Pipe line inspection and treatment inside human body.
Anita M. Flynn, Lee S. Tavrow, Stephen F. Bart and Rodney A.
Brooks MIT Artificial Intelligence Laboratory 20. Applications
- See and monitor things never seen before
- Medical applications such as cleaning of blood vessels with
micro-robots
- Military application in spying
- Building intelligent surfaces with controllable (programmable)
structures
- Tool for research and education
Micro robot interacting with blood cells 21. Future Scope 22.
Future Scope
- Realization of Microfactories
- Use in hazardous locations for planning resolution
strategies
- Search in unstructured environments, surveillance
- Search and rescue operations
- Space application such as the Mars mission
- Self configuring robotics (change shape)
23. Acknowledgements
- B. L. Feringa, In control of motion: from molecular switches to
molecular motors, Acc. Chem. Res., vol. 34, no. 6, pp. 504513, June
2001.
- H. C. Berg, Random Walks in Biology. Princeton, NJ: Princeton
Univ. Press, 1993.
- http://www.physorg.com/news79873873.html
- K.R. Udayakumar, S.F. Bart, A.M. Flynn, J.Chen, L.S. Tavrow,
L.E. Cross, R.A. Brooks and D.J.Ehrlich, Ferroelectric Thin Film
Ultrasonic MicromotorsFourth IEEE Workshop on Micro Electro
Mechanical Systems, Nara, Japan, Jan. 30 - Feb. 2, 1991.
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 1,
FEBRUARY 2006 1An Untethered, Electrostatic, Globally Controllable
MEMS Micro-Robot Bruce R. Donald, Member, IEEE, Christopher G.
Levey, Member, IEEE, Craig D. McGray, Member, IEEE,Igor Paprotny,
and Daniela Rus
- K.W. Markus, D. A.Koester, A. Cowen, R. Mahadevan,V. R.
Dhuler,D.Roberson, and L. Smith, MEMS infrastructure: The
multi-user MEMSprocesses (MUMPS), in Proc. SPIEThe Int. Soc. Opt.
Eng., Micromach.,Microfabr. Process Technol., vol. 2639, 1995, pp.
5463.
24. THANK YOU