PRESENTATION NAME

Use of micro ultrasonic vibration lapping to enhance the precision of micro holes drilled by micro electro-discharge machiningClassName Student ID M9910103Date2011.05.29 Outline 1. +USM 2. +ECDM 3. + LIGA 4. +chemical etching 5. ++ 6. BBM

Micro-EDM100 m()

Micro-EDM

Micro-EDM (XY Z C)Micro-EDM()(titanium plate)(micro-hole)500 m5 mMicro tools 0.3 mm

1007.50.5 mm copper plates10100.5 mm titanium plates

Titanium alloy (Ti6Al4V)

MEDMMUVL

3m

30 kHz

()

5%, 10%, 20% and 30%

5%10%

20%

Only Micro-EDM

Only Micro-EDM (Conclusion)MEDMMUVL5.4mA. C. Wang, B. H. Yan, X. T. Lee, F. Y. Huang, Use of micro ultrasonic vibration lapping to enhance the precision of micro holes drilled by micro electro-discharge machining, International Journal of Machine Tools & Manufacture 42(8) (2002) 915-923., A study of analysis and improvement on strength of micro shaft manufactured by micro-EDM,., ,.Thanks for you attention!!