NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

Scanning electron microscope(SEM)-掃描式電子顯微鏡

Adviser : KUN-SIAN WU

Reporter: CHIN-TUNG CHU2013/12/24

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Outline

1. Introduction

2. Principle & Structure

3. Application

4. Comparison

5. Conclusion

6. References

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Introduction

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Introduction

圖片來源 : 南台科技大學 FE-SEM 實驗室

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Introduction

Sir Joseph Thomson Ernst Ruska Max Knoll

Manfred von Ardenne(Zworykin)

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

Structure

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NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technologyStructure

• Vacuum system( 真空系統 )• Mechanical pump( 機械泵 ) 、 Oil diffusion pump( 油擴散泵 ) 、 Turbo molecular

pumps( 渦輪分子泵 ).

• Electron beam system( 電子束系統 )1. Electron beam gun( 電子槍 )- Field emission( 場發射 ) 、 Wolfram( 鎢 ) 、 Lanthanum

exaboride( 六硼化鑭 ).

2. Electromagnetic lens( 電磁透鏡 )

• Imaging system( 成像系統 )• Secondary electron( 次級電子 ) 、 Back-scattered electron wireless( 背散無線電

子 ) 、 Auger electron( 歐傑電子 ) 、 X-ray

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NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technologyStructure

9圖片來源 : 南台科技大學 FE-SEM 及奈米材料及電子實驗室

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Principle

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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PrincipleImaging in CRT/LCD

Electron beam gun

Bunching mirror system

SampleX-ray and electorn

Electron beam gun(high voltage)

The first Bunching mirror

The Second Bunching mirror

X-ray detectors

Sample room

Vacuum pump system(diffusion or Turbo molecular)

Objective

Electronic control and imaging system :1. Reflection electron 、 Secondary electron 、 Sample current Amplifier2. Selector Switch 、 Video enlarge 、 CRT 、 camera3. Zoom controller 、 Scan generator

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Application

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Application

圖片來源 : 南台科技大學 奈米材料及電子實驗室

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Comparison

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Comparison1. SEM: reflected by the incident electron.• 電子束經樣品反射

2. AFM: Van Der Waals Force • 原子間的凡得瓦力

1. Measurement needs in vacuum.• 需要在真空中量測

2. Samples must be conductive.• 樣品須為導電材質

3. Need gold, platinum if the material is not conductive.• 若材料不導電，需鍍上金或白金

4. Samples can not be a powder or a volatile items.• 樣品不能是粉末或揮發性物品

圖片來源 : 南台科技大學 奈米材料及電子實驗室

NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technologyConclusion

• 掃描式電子顯微鏡 (SEM) 雖然有真空下測量、樣品需導電及樣品不能為粉末等缺點，但其電子槍壽命可使用許久，相較於原子力顯微鏡(AFM) 的探針，確實是有優勢，而且樣品準備上也很簡單，在科學研究上還是有一定的地位存在。

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NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technologyReferences

1. 維基百科， SEM 、 AFM

2. 南台科技大學 , 碩士論文 , 莊凱揚3. 南台科技大學 , 碩士論文 , 許宏全4. 南台科技大學 ,FE-SEM 實驗室 , 奈米材料及電子研究室5. SEM 可使用地點 : 南台科技大學、成功大學、國家奈米實驗室、中

山大學

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NEM Lab.

Nano Electronic material Lab.

Southern Taiwan University of science and technology

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Thanks for your attention !