Post on 25-Feb-2016
description
ECR-CVD&HIT: :20:(49614024)(49614049)
(CVD) CVD (Chemical Vapor Deposition)()
plasma)CVDPlamsa Enhanced CVDCVDThermal CVDCVD photo- CVD
ECR-CVD
1982NTT
ECR?ECR()
(electron cyclotron resonance,ECR)
ECR-CVDfceHZBT fce = 2.8X1010 B
2.45GHZECR87.5mT
ECRECR (300K)10-210-3 Pa(1050 eV)(10-2)10111013 cm-3
/Pa105~102102 ~10-110-1 ~10-510-5 ~10-9
HIT
90%
H.I.T1992(SANYO) Floating Zone n-(Hetero-junction with Intrinsic Thin layer ,HIT)22%
HIT
HIT
ECRCVD HIT
ECRCVD HIT
[1], [2][3][4][5]VHF ECR/ICP
Thank you for your attention