ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For...

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Transcript of ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For...

ASM(J) Eagle XP – CVD350August 2014

ASM(J) Eagle XP - 3D model top/ right side view

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ASM(J) Eagle XP - Top view

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ASM(J) Eagle XP - Split unit view

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ASM(J) Eagle XP - precursor vessels drawing

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ASM(J) Eagle XP – gas schematic drawing reactor 3

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ASM(J) Eagle XP – gas schematic drawing reactor 4

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ASM(J) Eagle XP – clean room front view picture

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ASM(J) Eagle XP – clean room left side view picture

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