ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For...
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ASM(J) Eagle XP – CVD350 August 2014
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Transcript of ASM(J) Eagle XP – CVD350 - GLOBALFOUNDRIES USED …€¦ · RF Match ctr. Precursor Cabinet For...
ASM(J) Eagle XP – CVD350August 2014
ASM(J) Eagle XP - 3D model top/ right side view
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ASM(J) Eagle XP - Top view
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ASM(J) Eagle XP - Split unit view
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ASM(J) Eagle XP - precursor vessels drawing
Here: VOL.=1.3 LITERS
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ASM(J) Eagle XP – gas schematic drawing reactor 3
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ASM(J) Eagle XP – gas schematic drawing reactor 4
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ASM(J) Eagle XP – clean room front view picture
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ASM(J) Eagle XP – clean room left side view picture
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