Report - (AlGaN/GaN HEMT)之突波可靠度提升研 究-(I) 藉由覆晶 · PDF file圖1：化鋁鎵/氮化鎵高電子遷移率電晶體覆晶於金屬-絕緣體-金屬結構之氮化鋁子基板示意

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