1. Greetings , Pam . , fI . R&D , , , . . . 4 4 4 0 0 0 2 2
2 H st0' 2014 201 3 201 3 01 2 201 0 2 00 9 2008 2007 2 006 200 5
21lO 2003 2002 2001 1 997 1 994 1 992 ISO14001 ( BK Fami KPCA ( I
(i) NNo Mask Generator :S0 9001 [ GPM A 0 Mask Generatl r Mask
Gener 0r [0 ] () [ AM iso 9002 :() Laser PIotter Ge s )rl$0n Lser
Pker
2. E Beam Reicle Chrome Mask (Quartz)
3. #I , : : . / / I : . I I I (P 0T0 ASP , III , . P OTo + MASK
) 5 : ( ) . , , ' , ) . EmIs:0n ask (Soda L rn e) Chrome Aask (Soda
Lime)
4. RE CLE (-beam) Ret cle Mask (Seppe (Photo Repeater) . Ic 1
10 , , (Photo Plate) ( ). l Throughput) I , ( Tip) . 1 'Shol) , 1
(S ngle Die Reticle) . Fine Pitch 2 m. Conte ts Specification Leve
1 3. O m CD ToIerance l). 3 m Only Qua z Base 2.3T 6,35T h a erial
Size Data Format G S i , DW6, DXF 6ER R 1 .0 ,ll(QuaFtI) Coaed
Chrorne Q artz - 7 i (az) : 5 10 7 i : ".P * 0.25 m (1 .OcC /
500mrn) PR(Photo Res ster) = fJo00 / 10000 Chrome Layer = 1000 Quaz
/ Soda Lir ne Q az Soda Lime PII I a e ia ) AI2 03 2 03 NA2 0 K20
R0 ea ProI:: ert es ema k Qua z 1 00 4 5 10-7 / c Soda Lime 1 1 5 1
0 31 9 10-7 I C Chrome 70 107 / iank ask 1 00 1 200 0 C D ' ate
l'iaI Thickness 5 5" 6 6"
5. Chro e ask (coated Chro ne / Quartz or Soda Lime) Chrome
Mask i |i ol | , i i 11 i ) . i { ne A,nd Space lmage I i I . , . .
. . I i. 1 .0 (Soda L me) GIass - 1 00 90 80 70 60 50 40 30 20 1 lI
0 Chrorne Mask Process T , E Blank Mask Las Ex posi ng Washing
& Dry / Inspection Contents Spec fication Leve 1 2 4 ]'(: {:i
r(:)ss Gi'id Pi c h 0. 02fJ m 0. 05 m 0. 1 25 m 0. 25 m 0. 5 m C D
1 . 5m 3. 0 m 6, 0 m 1 0 m 1 5 m CD Tblerance 0.1 5m 0. 3 m 0, 5 m
0. 7Hm 1 .0 n M ate ria | Position Accuracy Thickness Material Size
Quartz or Soda Lime base 1 .0 m < 500mm < 5.0m 1,6T 2.3T 3.0T
5.0T 10 5" 2.500mm E: 1(S0d3 Li''g) I : 81 X I O 7 * 4 05m (1 .0e /
500nnn) Etching PR Striping 81x10 -7/ c Cae C rome dLim Dev0p' ng 0
40I)600 Wave Length(nl)I) a Lim( :: :I 0 Y k: ss
6. :: -------------------------------- EmLj Is 0n Mask(coated
Emuls0n / only Soda Lime Base) Emuls0n Mask () , Posit ve Resister
. Base kx,a rne GIass , Emuls 0n Thickness 5^'7m Chrome I Edge
Sha''pness , Chrome Mask ChroFK Mask ransmisSion() Humid Foks(. ,
lm Mask Position Accura y . Conte nts Spec fication Address Gr d
Pitch 1 . 25 m CD (Cr t caI Dimension) 35 m CD Tblerance 3.0m M ate
rial Only Soda Lrne BI::; se Pos tion Accuracy 5.Om ''' 20 m
Thickness 2.3T 4.8T nllater aI S ze 14 17" ,' 59" 1.0 (Soda Lime)
500 mm ': :::i =:i: :-:rr: : ' : = : : * : - i ] ". = ---::::t= --
: :::: ::.r ::;::::: :i: : : :: : -=::::-::: -:: :: mulsion ass
PIate Emuls 0n Ma:sk Process i * :; Coated Emuls 0n Soda L me :-::
': :: :-::: : - :- :::: : :: Es o1 = 5.0 ''' 7.5 m Soda Lime Back
Coat ::: :: : Wosh'r & Dry: / Inspection ::: :: ::::::: : ::
-::: ::::::::: : 20.0 ml 5.0 m 81 x1 0-7/ ::: ::::-: : ::::::: -::
: :':: 5 ''' 7.5 m 511 C ":'' ser Expos ngEmulsion GIass PIate
8. , : : : E E1 :::::!:::; : ii! (CAD)0 . , l: L , U :LI ' , i
:I i.: EI i , I i I 0 : I i , ! i . : Form DWC . DXF. G RBER. DPF
ODB++ . GDS il:: . Mask: I dge , 10 25nnm 0i i Li0f I 0: . :
::-::-=:::-::::: : : : :: ::::::::::-: : : -::
