Tem2

4-5. Ion milling : grinding and polishing (abrasive – I)

강원대학교 공동실험실습관

4-6. Ion milling : grinding and polishing (abrasive – II)


4-7. Ion milling : grinding and polishing (abrasive – III)


4-8. Ion milling : dimple grinding


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• Tool material/coating

• Tool profile

• Tool thickness/diameter

• Pressure (force) of tool

• Slurry composition and grit

• Speed of rotation

• Tool/sample contact area

• Time

Tool shape determine dimple profile

4-8. Ion milling : dimple grinding


4-9. Ion milling : differential thinning problems


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4-10. Ion milling : solutions for differential thinning problems


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4-12. Ion milling 시 thickness fringe 형성

Cross-section sample

Plan-view sample

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5. Tripod polishing 법을 이용한 cross-section 시료 제작


5-1. Tripod polishing 법을 이용한 cross-section 시료 예


5-2. Tripod polishing : wheel rotation


Cross-section sample

6. Ultramicrotomy 법을 이용한 시료 제작


6. Ultramicrotomy 법의 기초 및 장점


6. Ultramicrotomy 법의 단점


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6. Ultramicrotomy 법의 사용예


7. Electro-polishing 법


7-1. Electro-polishing 법의 장 · 단점


8. 특수 시료 (powder, coated material, fibers)


9. Summary 및 장 · 단점 비교


10. Specimen contamination


10-1. Plasma cleaning


10-2. Plasma cleaning


11. Related web-sites


1. http://ncem.lbl.gov

(National Center for Electron Microscopy, Lawrence Berkeley National Laboratory)

2. http://gatan.com

(Gatan)

3. http://www.msd.gov/groups/ht/index.html

(Argonne National Laboratory)

4. http://www.ornl.gov/bes/BES/microscopy/microsco.htm

(Oak Ridge National Laboratory)

5. http://asma7.iamp.tohoku.ac.jp/EMILIA/html/eg/index.html

(Tohoku University)

Tem2

Technology

Transcript of Tem2