T he P rinciple of M icroscopy : SEM, TEM, AFM
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The Principle of Mi-croscopy : SEM, TEM, AFM
2014.02.25So-Yeon Park
Tuesday seminar
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Contents
• Introduction : Motivation for Microscopy• Electron Microscopy - interaction with matter - SEM : Scanning Electron Microscopy - TEM : Transmission Electron Microscopy
• AFM : Atomic Force Microscopy
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Motivation of microscopy
Resolution of light microscope is limited ▶ possible magnification : ~ 2 000
Different approach : use electrons instead of light ▶ access to much smaller wavelengths ▶ electrostatic lenses instead of glass lenses ▶ possible magnification : ~ 2 000 000
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Interaction with matter
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Interaction with matter
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SEM
Scanning
Electron
Microscopy
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Electrons for SEM image
Secondary electrons (SE)
Backscattered electrons (BSE)
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Electrons for SEM imageElectron beam Electron beam
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Electrons for SEM imageThe intensity of emitted secondary electron for a line scan over some different surface features
Edge ef -fect
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Functional principle
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Functional principle
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Functional principle
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Functional principle
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Functional principle
Electron detec-tor
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Main concern of SEM
High vacuum : to avoid crashing into air
Edge effect
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Main concern of SEM
Charging effect ▶ non-conductive mate-rial ▶ no electrons escaping
from specimen ▶ Gold coating
Au, Pd, Pt
More electronDiffraction
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Gold coating
EBT2 with Au coating
Graduate School of Convergence Science and Technology. Seoul National University
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Example
EBT2
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TEM
Transmission
Electron
Microscopy
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Functional principle
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Functional principle
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Functional principle
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Functional principle
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Example
Lung cell
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AFM
Atomic
Force
Microscopy
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Principle
Position-sensitive photodetector
Laser diode
Cantilever spring
Tip
by measuring forces between a sharp probe (<10 nm) and surface at very short distance
Tip
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Mode of operation
(1) Contact AFM < 0.5 nm probe-surface separation (2) Intermittent contact (tapping mode AFM) 0.5-2 nm (3) Non-contact AFM 0.1-10 nm
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Contact mode
The force on the tip is repulsive. Advantage: fast scanning, good for rough samples Disadvantage : at time forces can damage/de-form soft samples
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Intermittent mode(Tapping)The cantilever is oscillated at this resonant Frequency. Advantage: high resolution of samples that are easily damaged, good for biological samples Disadvantage : more challenging to image in liquids, slower scan speeds needed
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Non-contact mode
The force on the tip is attractive. Advantage: VERY low force exerted on the sample, extended probe lifetime Disadvantage : lower resolution, usually need ultra high vacuum to have best imaging
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Limitations of AFMUsed to study a wide variety of samples. The physical probe is not ideally sharp.An AFM image dose not reflect the true sample topography.
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Limitations of AFMFor water droplet(물방울 )
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Example
Lung cell
Collagen matricesEBT2 film
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Thank you for attention :D