T he P rinciple of M icroscopy : SEM, TEM, AFM

34
The Principle of Microscopy : SEM, TEM, AFM 2014.02.25 So-Yeon Park [email protected] Tuesday seminar

description

Tuesday seminar. T he P rinciple of M icroscopy : SEM, TEM, AFM. 2014.02.25 So- Yeon Park [email protected]. Contents. Introduction : Motivation for Microscopy Electron Microscopy - interaction with matter - SEM : S canning E lectron M icroscopy - PowerPoint PPT Presentation

Transcript of T he P rinciple of M icroscopy : SEM, TEM, AFM

Page 1: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

The Principle of Mi-croscopy : SEM, TEM, AFM

2014.02.25So-Yeon Park

[email protected]

Tuesday seminar

Page 2: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Contents

• Introduction : Motivation for Microscopy• Electron Microscopy - interaction with matter - SEM : Scanning Electron Microscopy - TEM : Transmission Electron Microscopy

• AFM : Atomic Force Microscopy

Page 3: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Motivation of microscopy

Resolution of light microscope is limited ▶ possible magnification : ~ 2 000

Different approach : use electrons instead of light ▶ access to much smaller wavelengths ▶ electrostatic lenses instead of glass lenses ▶ possible magnification : ~ 2 000 000

Page 4: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Interaction with matter

Page 5: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Interaction with matter

Page 6: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

SEM

Scanning

Electron

Microscopy

Page 7: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Electrons for SEM image

Secondary electrons (SE)

Backscattered electrons (BSE)

Page 8: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Electrons for SEM imageElectron beam Electron beam

Page 9: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Electrons for SEM imageThe intensity of emitted secondary electron for a line scan over some different surface features

Edge ef -fect

Page 10: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Page 11: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Page 12: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Page 13: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Page 14: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Electron detec-tor

Page 15: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Main concern of SEM

High vacuum : to avoid crashing into air

Edge effect

Page 16: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Main concern of SEM

Charging effect ▶ non-conductive mate-rial ▶ no electrons escaping

from specimen ▶ Gold coating

Au, Pd, Pt

More electronDiffraction

Page 17: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Gold coating

EBT2 with Au coating

Graduate School of Convergence Science and Technology. Seoul National University

Page 18: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Example

EBT2

Page 19: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

TEM

Transmission

Electron

Microscopy

Page 20: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Page 21: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Page 22: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Page 23: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Functional principle

Page 24: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Example

Lung cell

Page 25: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

AFM

Atomic

Force

Microscopy

Page 26: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Principle

Position-sensitive photodetector

Laser diode

Cantilever spring

Tip

by measuring forces between a sharp probe (<10 nm) and surface at very short distance

Tip

Page 27: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Mode of operation

(1) Contact AFM < 0.5 nm probe-surface separation (2) Intermittent contact (tapping mode AFM) 0.5-2 nm (3) Non-contact AFM 0.1-10 nm

Page 28: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Contact mode

The force on the tip is repulsive. Advantage: fast scanning, good for rough samples Disadvantage : at time forces can damage/de-form soft samples

Page 29: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Intermittent mode(Tapping)The cantilever is oscillated at this resonant Frequency. Advantage: high resolution of samples that are easily damaged, good for biological samples Disadvantage : more challenging to image in liquids, slower scan speeds needed

Page 30: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Non-contact mode

The force on the tip is attractive. Advantage: VERY low force exerted on the sample, extended probe lifetime Disadvantage : lower resolution, usually need ultra high vacuum to have best imaging

Page 31: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Limitations of AFMUsed to study a wide variety of samples. The physical probe is not ideally sharp.An AFM image dose not reflect the true sample topography.

Page 32: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Limitations of AFMFor water droplet(물방울 )

Page 33: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Example

Lung cell

Collagen matricesEBT2 film

Page 34: T he  P rinciple of  M icroscopy :  SEM, TEM, AFM

Thank you for attention :D