Precision Systems Control Laboratory (PSCL)

Jia-Yush Yen

2

子計劃一：資料傳輸與控制驅動系統

子計劃二：電子光學系統設計與製作

子計劃三：機械系統設計與製作

70,950 cross-wafer beams1-mm beam pitch

子計劃四：低電壓電子束微影製程

Recent Projects

• Massively Parallel E-Beam Lithography System

Zone-Plate Based EUV Direct Write Lithography System

Artificial Eye(a)

(b)

Nano-Pattern Stitching

AFM Manipulation or Nano Manufacturing

Experiment hardware

- Two Adlink I/O card (9111DG 、 6308V) - Pentium PC

Result of spiral flat with PID controller

Result of spiral flat with PID controller

Spiral LineSpiral Line

Lithography skill by PI

Nano-line method(2)

個別行進方向

總行進方向

Nano-point method(1)By Nano-line(1) combine a circle

Combine nano-line(2) method

Bio-mimetic Robots

16

Bio-mimetic leg design

17

Modifications

• Aluminum alloy legs• Acrylic body

18

Turtle test platform

Real Module

112/04/21 NTU PSCL

Real Module

112/04/21 NTU PSCL

Wireless Health Monitoring Device

One Very Brief Review

ARM9 Development Board

(running WinCE)

RF Transceiver

sensor

RF

RS232

sensorsensor

802.11b

Health Care Center

Mobile device

Hardware

• Symbian OS was chosen forits open-minded architectures.

• I chose N95 for its mobility and connectivity.

I/O problem

Q1 ： USB-Host or USB-OTGA1 ： Reprogrammed to Bluetooth protocol.

or Ask Project-F to use USB-Host driver chip.

New Smart Solar Brick

Smart brick

Solar tracker

Color solar cell

Optical fiber

Hydrogen generator

Solar power

Optical fiber lighting

Area :20cm x 40 cm

27

Smart brick integration

Solar cell

Optical fiber

Composite film structure at anode “Photovoltaic effect”

“Pyroelectricity”

TiO2 nanotubes

PZT thin filmRectifier circuit

Bias from solar cell

+ -

PhotoelectrolysisH2 generation

at Pt cathode

e-

Light & Heat

New visible light absorbing oxides

UV-Vis absorption spectra of:(a) SrTiO3

(b) Mixture of (0.75AgNbO3 + 0.25SrTiO3)(c) Solid solution (Ag0.75Sr0.25)(Nb0.75Ti0.25)O3

(d) AgNbO3

(Ref: J. AM. CHEM. SOC. 130, 2724-2725, 2008)

Composite film

structure

Bias

Task 1: New oxide materials

Task 2: Photovoltaic + Pyroelectricity

Machine Tool Servo Design

Solid Modeling Servo 30

New Design Procedure

CAD tool

Controller synthesis tool

Structural analysis tool

Specifications

Prototyping

Modal testing

Servo implementation

Servo tuning

Performance test

Dynamic simulation tool

Integrated System Model

Solid model for the Grinding Machine

Solid Modeling Servo 32

無擋板下之受力變形

Solid Modeling Servo 34

強韌性驗證• 改變平台的負載• O：總重 800kg• +：總重 750kg• －：總重 703kg

• 調整輸入增益• O ： 1.2倍• + ： 0.8倍• －：原輸入增益