전자현미경의 회절원리와 나노구조분석 응용 Polymer Science and Technology Vol. 17,...

17 4 2006 8 493

1.

. 1895 Wilhelm Conrad Rntgen cathode ray generator X-ray

. X unknown . 1912

Max von Laue X-ray

Laue pattern

. Bragg(: William Henry Bragg

: Sir William Wawrence Bragg) Laue

Bragg .

Bragg 15. 1 Britannica Bragg

. 1927 Davisson Germer X-ray

(electron) .

1923 Louis

de Broglie

. X-ray

.

)Cm

EeEe(m

hEem

hmvh

0 20

0

212

2+

===

Hendrik Antoon Lorentz 1900 Theory of the Elec-

tron Lorentz force

( BvqEqFrrrr

+= ) .

1932 Ernst Ruska Max Knoll

1935 M. Knoll

Lorentz force

.

. 1938 von

Ardenne .

Ruska von Borries Siemens

.1-3

.

, ,

.

.

(transmission electron micro-

scope)

Electron Diffraction and Nanostructural Analysis in Electron Microscope (Jae-Pyoung Ahn, Advanced Analysis Center, KIST, 39-1 Hawolgok-dong, Seong-buk-gu, Seoul 136-791, Korea) e-mail: [email protected] (Jong-Ku Park, Nano-Materials Research Center, KIST, 39-1 Hawolgok-dong,Seongbuk-gu, Seoul 136-791, Korea)

1988 1992 1996 2000 2000

() () () Berkeley National Lab. & UC Berkeley () KIST ,

1982 1984 1990 1990

() () () KIST ,

494 Polymer Science and Technology Vol. 17, No. 4, August 2006

(crystal structure) . EELS

(electron energy loss spectrometer) TEM

. EELS

HRTEM .

, .

. KIST

.

.

2. TEM

TEM 1932 1990 60

, , EDS

. TEM 2 3 . ,

(crystal orientation),

(contrast)

.

(electron)

.

.

.

.

TEM EDS(energy dispersive spec-

trometer) EELS(electron energy loss spectrometer)

2 . EDS

X-ray . EELS 2000

.

TEM

.

3 1990 TEM 2000 TEM .

3 STEM , (electromagnetic field or property)

Lorentz TEM,

3 tomograph, Cryo

TEM, energy filtering

.

3. -

3.1

. 18

1. Drawing and equation of Braggs law.

2. Three important factors forming the image contrast in TEM.

3. Applications of conventional and advanced TEM.

17 4 2006 8 495

.

4 1 .

(crystal system)7

bravais lattice14

point group32

space group230

(unit cell)

. 32 (point

group) . 32 7 ,

7 (seven crystal systems) .

(lattice point)

. (crystal system) 2 3

. 7

( 1). 1850 Bravais(, 1863-1863) 7 14 4 14

Bravais lattice .

Primitive 8,

(equivalent) . lattice

() , 7

. 8 lattice equivalent

lattice . ,

. Bravais 7 14

Bravais lattice .

(SAD, CBED, Kikuchi )

14 .

point group

2 noncentrosymetry 21, centro-symetry 11 32 point group .

point group

.

point group .

point group

. Point

group

. (point)

, , 3 symmetry operation

. 3 (2) .

1. 7 Crystal Systems

Lattice Point Group System

Schoenflies International Lattice Symmetry Bravais Lattice

Triclinic E or i P 1 abc ,

Monoclinic C2 or P,C 2/m abc,

==90(1st setting) ==90(2nd setting)

Orthorhombic Two C2 or P,C,I,F mmm abc, ===90 Tetragonal C4 or S4 P,I 4/mmm a=bc, ===90

Cubic Four 3-fold Axes(P,I,F) m3m a=b=c, ===90 Hexagonal C6 or S3 P 6/mmm a=bc, ==90 ; =120

Trigonal(rhomboheral) C3 or S6 R 3m Same as hexagonal

(a=b=c ; ==


point , ,

.

14 Bravais lattice point group symmetry op-

eration(glide screw)

230 . (, group)

(, space group)

. In-

ternational Tables for Crystallography A

.

230

. space group ,

230 space group .

14 Bravais

. Point group Bravais lattice

lattice point lattice

.

.

(glide)

(screw) . Screw

glide rotation

.

International Tables for Crystallography 4 230 space group 1 230

operation

2005 5 . space group

2 . space

group Strukturbericht, Sc-

hoenflies, Unit Cell, Pearson symbol, Hermann-Mauguin

. Hermann-Mauguin international

symbol space group

.

3.2 - (X-ray )

? ,

, 3 . 5 2 (secondary electron),

(back scattered electron), Auger , X-ray,

.

.

( ) .5

column obj, inter-

mediate, projection ray diagram

.

2 ( ) .

.

X-ray sinusoidal

. X-ray

.

.

X-ray , X-ray

.

. X-ray

Thomson equation coherent scattering

. co-

herent scattering .

. Thomson equation( ))2

2cos1 2

2

(

k

II op+

= coherent

scattering intensity

scattering .

3

. ,

,

.

. wave ,

,

(

) . .

i) (hkl) (F)

amplitude , 0 (hkl)

.

ii) wave ()

( )

.

4.

TEM (Scat-

5. Scattering between electron beam and atoms in specimen.

17 4 2006 8 497

tering) .

. 6 ( )

ray diagram .

(objective lens)

3 . , , ,

. 6 .

back focal plane plane

. back focal plane

6 .

(spot) , .

(objective lens)

.

(

) .

.

2

.6,7

SAD(selected area

diffraction) , ring , nano micro SAD

.

CBED

(convergent beam electron diffraction) .

Kikuchi spot

. Kikuchi

.

.

4.1 TEM XRD TEM .

X-ray(CuK, 1.54 ) TEM(200 keV, 0.025 )

.

3 . -Al2O3 X-ray TEM

.

, (d-spacing), X-ray , TEM

,

. TEM X-ray

. TEM

. TEM

.

. 15 mm(600

mm0.025 ), TEM SAD

1.32 mm 3 R . R spot ring

. 4 XRD TEM . TEM XRD

.

4.2 SAD TEM

SAD . SAD TEM

TEM

.

low index (ZA, zone axis)

SAD . SAD ZA

Kikuchi line .

ZA

ZA ( 7). 2 . TEM

,

ZA .

.

6. Ray diagram of specimen, objective lens, back-focal plane,

and image-forming plane in TEM column.

3. An Example Showing the Difference of X-ray and Electron

Diffraction from -Al2O3 powder

plane d-spacing XRD(2theta) TEM(2theta) R(mm,600) 101 7.59 11.64 0.19 1.32 102 6.39 13.84 0.22 1.57 103 5.52 16.03 0.26 1.82 112 5.09 17.39 0.28 1.97 113 4.56 19.42 0.31 2.20 114 4.07 21.84 0.35 2.47 115 3.61 24.66 0.40 2.78 213 3.23 27.62 0.45 3.11 214 3.05 29.28 0.47 3.29 117 2.88 31.04 0.50 3.49 222 2.72 32.83 0.53 3.68 118 2.60 34.48 0.55 3.86 312 2.46 36.53 0.58 4.08


TEM

. .

3 1o .

.

(optic axis) (),

2 (). Brag

.

4. Comparison of XRD and TEM

7. Relationship of ZA and crystal planes. Several crystal planes

can have a ZA. 8. Geometric drawing on the diffraction of electron and crystal

plane in TEM. The center spot is the transmitted electron beam and

the off-axis spot the diffractted electron beam.

17 4 2006 8 499

Bragg 2dsin Tayler sin tan . Bragg 2d . , tan22Rhkl /L . 2 , TEM LRhkld . L , TEM (200 keV 0.02508

), L TEM SAD

( 200, 300, 600 mm .

), Rhkl ( CCD

) (

10 mm ), d

d-spacing(Al(111) d 2.338 ).

200 keV 15 mm

Al(111)

R(111)6.436 mm.

. ZA Indexing

, Indexing

.

.

.

indexing

.

JCPDS

, indexing

.

.

.

.

.

ZA .

SAD

.

4.2 Ring ring SAD

. SAD

.

SAD

.

11

? 9 . 11 ZA

. 11 ZA

. 11

. 11 ZA

. 8 1 SAD 2, 3, ....11

. 11 SAD

Ring . SAD

Ring

.

Ring . Ring

.

Ring SAD

. TEM

(1 m ) Ring , (1 m ) SAD . Ring SAD

.

4.3 Kikuchi TEM

.

Kikuchi Kikuchi

. Kikuchi

SAD .

4.3.1 TEM spot (SADP

ring ) .

spot Kikuchi

Kikuchi .

9. The formation process of ring pattern when the diffraction

occurs from a grain(particle) to twelve grains(particles).


.

4.3.2

(scattering) .

.

. SAD

Kikuchi

. ,

Kikuchi . Kikuchi

.

.

4.4 CBED CBED

. CBED SAD

Kikuchi CBED

.

CBED SAD

. SAD

, CBED

. 10 (a)

back focal plane

SAD . (b) C2 ()

back focal plane .

nm

.

CBED

back

focal plane

. CBED .

CBED SAD

cell volume , ,

(large angle CBED), , space group ,

.

CBED cell voume

.

Ewald

10 . (reciprocal lattice) (real lattice) 3

. TEM

.

, unit cell .

11(a) ZOLZ, FOLZ, SOLZ . 10(b) ring . 10(a) ring ZOLZ, ring FOLZ, ring

SOLZ .

12 Ewald sphere . Ewald

Ewald .

FOLZ SOLZ

. CBED SAD

(a) (b)

10. SAD and CBED patterns.

11. Laue zone in CBED pattern.

17 4 2006 8 501

FOLZ ring .

ZOLZ

FOLZ ring CBED .

5. CBED

CBED

13 14 . CBED ZOLZ (SAD ), Kikuchi , HOLZ ring, HOLZ

4 .

1) ZOLZ ZOLZ SAD

. SAD CBED

spot . SAD

CBED ZOLZ .

.

2) Kikuchi Kikuchi SAD

ZA

ZA

.

3) HOLZ ring Ewald

. ZOLZ FOLZ

Ewald HOLZ ring . HOLZ ring

unit cell ,

. HOLZ ring unit cell

( 15).

K2 =(K-H)2+Rad2

2 KHH2+Rad2 Rad2

HRad2/2 (measured H) HP/[a(u2+v2+w2)1/2](theoretical H)

4) HOLZ Kikuchi

. Kikuchi ZOLZ

HOLZ .

. two

beam

.

5) CBED

unit cell volume

/ .

ZA SAD unit cell

. , unit cell

. 16 2)1(21

RRRR =rr

12. The variation of Ewald sphere by parallel and convergent

beams.

13. A typical CBED pattern.

14. ZOLZ disc, distance and angle between spots(discs) in

CBED pattern.


. CBED unit cell (

, H) unit cell

. unit cell

.

)](tan cos-[1)sin(VolumeCellUnit

1-21

32

RAD/LANGRRL

=

TEM

.

CBED unit cell

.

, nm

CBED unit cell

.

6. HRTEM

.

X-ray . X-ray

( )

. TEM probe

.

.

HRTEM

. HRTEM

(under focus beam)

(dose)

.

6.1 HRTEM 8,9 HRTEM

.

.

17 obj () obj back focal plane .

.

back focus plane

back focal plane .

plane .

plane intermediate projection

screen HRTEM

(lattice) 300,000

17. The formation process of HRTEM image in the ray diagram

of TEM.

15. TEM geometry for the calculation of unit cell from CBED

pattern.

16. Geometry of CBED whole pattern for the calculation of unit

cell from CBED pattern.

17 4 2006 8 503

. HRTEM

HRTEM

. (cou-

lomb potential difference) .

17 HRTEM plane, ray diagram, amplitude, function, display

. Plane ray diagram

amplitude, wave function, display

. real space

reciprocal space .

3

. amplitude phase

. amplitude ,

HRTEM phase difference .

HRTEM

phase .

(real space): real space

(transmission function)

. (structure factor)

(electron wave)

.

(objective transmission function)

.

zyx,i-expy)q(x, = )(

)z(ify)i(x,-1 tphaseobjec weak==

back focal plane(reciprocal space):

objective

(wave) (trans-

fer function, T(u,v)).

amplitudendiffractio= v) T(u,y)Fq(x,v) q(u,

nctiontransferfu= v)](u,exp[iv) T(u,

(real space):

plane, (image amplitude)

convolution .

v) FT(u,*y)q(x,v)FQ(u,y)(x, ==

.

.

y)(x,v)] F[Q(u,v) Q(u,y)]F[q(x,y)q(x, ==

F Fourier . , Fourier

. (

) Fourier back focal plane

.

potential

.

.

( ) defocussing ( ).

HRTEM (point resolution)

TEM .

(spherical aberration, Cs) HRTEM

(Cs) defocussing(f ). phase shift

.

defocussing phase shift()

ufd

2=

phase shift(obj )

uC ss 2

4=

phase shift

. phase shift .

)C (u,f) (u,(u) s +=

uC

uf s

2

42 +

=

HRTEM CL1, CL2

underfocus

.

(brightness)

(constrast) .

HRTEM obj

.

6.2 HRTEM HRTEM 3

.

HRTEM (d-spacing)

18 ZnO cross section HRTEM . lattice

d-spacing

. HRTEM A, B d-spacing

. A B (A d-spacing)=2.60 ,

(B d-spacing)=2.81 . ZnO

(002) (100).

.


HRTEM FFT indexing

HRTEM FFT

indexing . DM

(Digital Micrograph, Gatan) HRTEM

FFT HRTEM

. forbidden

HRTEM lattice

. ZnO .

3.54 1/nm 1.92 1/nm .

d- spacing 0.28 nm,

0.55208 nm. ZnO (100) (001)

. (001) forbidden

. FFT 1.92 2

(spot) (002) . FFT

SAD (indexing)

. FFT

indexing ZA [010]

19 . HRTEM

20 In2O3(ZnO)5 TEM .

. HRTEM

FFT inde-

xing

.

20 In2O3(ZnO)5 HRTEM 21 . 6

(superlattice structure) . 22

1.3 nm/50.26 nm. ZnO

(002) . ,

0.1648 nm

. ZnO

, In2O3

. In

.

ZnO

.

ZnO ZA=[110] defocussing

23 HRTEM map . map

( )

18. HRTEM micrograph of ZnO nanowire.

2 nm

A direction

B direction

20. TEM image with low magnification of In2O3(ZnO)5 nanowire.

19. FFT(Fast Fourier Transformation) and its indexing result of

ZnO HRTEM image at Figure 17.

1.92(1/nm)

3.54(1/nm)

(002) (001)

(100)

(000)

(-100)

(00-1)

(00-2)

ZA=[0-10]

17 4 2006 8 505

. In2O3 ZA= [-1-12]

defocussing

24 HRTEM map . HRTEM map (

) .

25 Zn, In, O

.

HRTEM EELS

elemental mapping (

26). (a) HRTEM (b) EELS elemental mapping (Zn) . Zn

.

7. KIST

7.1 TEM , ,

Schottkey , ( 40)

S-TWIN

.

0.24 nm (

27). CompuStage PC

. EDX EELS

. EL

28 29 . EDS EELS

line profile . EL

HAADF EDS EELS

21. HRTEM image of In2O3(ZnO)5 nanowire( 20).

22. Line profile for the lattice plane of In2O3(ZnO)5 with super-

lattice structure.

23. HRTEM simulation of ZnO.

24. HRTEM simulation of In2O3.

25. Final structural analysis of In2O3(ZnO)5.

26. TEM image and EELS elemental mapping(Zn) of In2O3(ZnO)5.

In2O3

[-1,1,0]

[ZA=[-1,-1,2] [1,1,1]


. 28 SEM TEM FIB

.

TEM Lorentz holo-

graphy Bipolar

. 30 31 (magnetic domain) TEM .

Lorentz force .

TEM ,

, .

32 single CNT TEM . TEM EELS

energy filtering .

contrast

. EELS

energy-filtered TEM(EFTEM)

. 32 .

, , .

29. Elemental mapping using STEM function from OLED cross

section sample. In the OLED sample, it is difficult to analyze nanos-

tructures by other methods because it consists of organic compounds.

28. TEM micrograph of multilayer thin film and line profiles using

EDS(energy dispersive spectrometer) and EELS(electron energy loss

spectroscopy) detectors from the red line(marker) on the TEM image.

27. High Resolution TEM images and SAD(selected area dif-

fraction) pattern of carbon nanotube. The (001) planes of graph-

ite(d(001)=3.4 ) are clearly shown in the HRTEM.

30. Holography images visualizing magnetic field. From this

images, we can calculate the relative or absolute strength of mag-

netic field.

31. Fresnel image of 200 nm wide domain walls in NdFeB. On

the a domain strip, we can see the set of white and black lines. It

gives a useful information, which we can define the spin direction in

domain.

32. General TEM and EFTEM images of polymer-coated CNT

single nanotube.

17 4 2006 8 507

TEM

.

.

7.2 , (SEM)

. Environ-

mental scanning electron microscopy( ESEM)

3 . ESEM

PLA(pressure limited aperture)

20 torr

. GSED(gaseous secondary elec-

tron detector) SE

, (1500 )

. 33 heating stage WC-Co granule ESEM

SEM

. wet, dirty, oil, out-gassing

,

. ESEM

.

ESEM

. ESEM SEM BSE

, SE

.

34 GaN SEM CL . SEM

morphology . GaN

.

CL

34 .

35 () (orientation)

.

(grain)

. 35 5 5

. SEM EBSD

.

.

7.3 NanoSEM ,

. (20

33. Observation of WC-Co granules during in-situ heating.

34. SE and cathode luminescence(CL) images of GaN/Al2O3.

From CL image, point defects and voids are observed.

35. (Upper left) the geometry of electron, sample and diffrac-

tion in SEM chamber, (Upper right) electron back-scattered dif-

fraction (EBSD) patterns from the electropolished Al metal surface,

and (lower left and right) SEM image and the analysis of grain ori-

entations EBSD patterns, respectively.


nm) .

.

.

( 36). NanoSEM 0.20.5 kV

( 3 nm) .

(STEM :

scanning transmission electron microscopy)

. /

. ET

(GSED : gaseous secondary electron de-

tector) (TLD : through the lens detector)

. TLD

.

.

.

7.4 Focused Ion Beam(FIB) (focused ion beam, FIB)

(SEM) . FIB

( ) , 10 nm

. SEM

. SE

. ,

,

, (TEM) ,

.

37 FIB nm .

38 manipu-

lator 2

.

39 SEM . ()

SEM FIB

.

.

36. SEM images of catalyst observed as a function of operating

acceleration voltage. The catalyst particles are not separated at the

operating condition of 1.0 kV but are clearly distinguishable at the

operating condition of 0.5 kV.

37. First of all, the sample is polished before mounted in FIB

chamber or some interesting regions have to be exposed on the top

surface of sample. The polished sample goes to the FIB chamber

38. The very small piece with 10 m lifted-out from Fig. 10moves and welded to the edge of TEM Cu crown grid. The TEM

sample attached at Cu grid is ion-milled at the low voltage of 2 kV for

reducing the surface damage by Ga ion.

39. It is common to see the pretty pictures of pollen on

NnaoSEM operating low voltage. We can acquire more scientific

image by using FIB milling method. The pollen cross-sectioned by

FIB reveals the internal structure.

17 4 2006 8 509

2006 8 CryoTEM(FEI Inc. Tecnai

F20) . Cryo

TEM

.

.

8.

, , ,

, ,

.

.

.

1. J.-P. Ahn, Diffraction principle and Structural Analysis of TEM, KIST, Seoul (2006)

2. D. W. Kum, K. H. Kim, and W. J. Lee, TEM Analysis, Chungmungak, Seoul (1996)

3. D. B. Williams and C. B. Carter, Transmission electron microscopy: A textbook for materials science, Plenum Press, New York (1996).

4. B. Shmueli, International Tables for Crystallography, Springer, Berlin (2001).

5. B. D. Cullity, Elements of X-Ray Diffraction, 2nd ed., Addison Wesley, Nortre Dame (2001).

6. D. Shindo and T. Oikawa, Analytical electron microscopy for materials science, Springer, Berlin (2002).

7. B. Fultz and J. Howe, Transmission Electron Microscopy and Diffractometry of Materials, Springer, Berlin (2001).

8. P. Buseck, J. Cowley, and L. Eyring, High resolution electron microscopy and related techniques, Oxford Univ Press, Oxford (1989)

9. S. Horiuchi, Fundamentals of HREM, North Holland, Amsterdam (1994).

.

1.

Organic thin films, polymers, and small molecules(Structure

analysis)

D. L. Dorset: [email protected] or [email protected]

I. G. Voigt-Martin: [email protected]

C. Gilmore: http://www.chem.gla.ac.uk/staff/chris/index.htm

U. Kolb: http://www.uni-mainz.de/~kolb/

J. R. Fryer: http://www.chem.gla.ac.uk/~bob/fryer.html

J. Spence group. http://www.public.asu.edu/~jspence/

M. R. Libera, Stevens group: http://www.mat.stevens-tech.

edu/faculty/l ibera.html

2.

Inorganic Materials, Non metals(structure analysis, CMR, High

Tc, ceramics etc.)

O. Terasaki, Framework structures. [email protected]

Lawrence Berkeley Laboratory National Center for Electron

Microscopy http://ncem.lbl.gov/frames/center.htm

S. Hovmller: Electron crystallography: development of methods and software, quasicrystals and approximants. http://www.

fos.su.se/~svenh/index.html

L. D. Marks: Surfaces, etc. http://www.numis.nwu.edu/internet/

Staff/faculty.html

K. H. Kuo: Structures of quasicrystals and their crystalline

approximants: http://www.blem.ac.cn/english/introdution/in-

trodution.htm

Shindo group. Magnetic materials, phase transformation, en-

ergy-filteredED, holography http://www.iamp.tohoku.ac.jp/

~asma

W. Sinkler: http://www.numis.nwu.edu/internet/Staff/wharton/

X.D. Zou: [email protected]

T.E. Weirich: [email protected]

A. Avilov; electron diffraction analysis, electrostatic potentials.

[email protected]

3. , Alloy Phases

J. Gjonnes: [email protected]

Jing Zhu: [email protected]

De Hosson' group: http://rugth30.phys.rug.nl/msc_matscen/

4. , Biology. Cryomicroscopy.

Glaeser group. Cell membrane proteins, automation of sin-

gle-particle EM http://mcb.berkeley.edu/, http://www.lbl.gov/

lifesciences/main/index.html, http://www.lbl.gov/LBL-Pro-

grams/pbd/

R. Henderson: http://www2.mrc-lmb.cam.ac.uk/research/SS/

Henderson_R/Henderson_R.html

B. K. Jap: [email protected]

K. H. Downing: [email protected]

W. Chiu: http://scbmb.bcm.tmc.edu/people/gcc_faculty_77

W. Baumeister:http://www.biochem.mpg.de/baumeister/perso

nal/baumeister.html

T. S. Baker: http://www.bio.purdue.edu/Bioweb/People/Fac

ulty/baker.html

Z. H. Zhou: http://hub.med.uth.tmc.edu/~hong/

N. Unwin: http://www2.mrc-lmb.cam.ac.uk/groups/nu/index.

html

Y. Fujiyoshi: [email protected]

5. , STEM


Prof J. Silcox [email protected]

Dr. S. J. Pennycook:http://www.ornl.gov/bes/BES/amis/staff/

pennycook.htm

Dr. P. Batson [email protected]

Prof. N. Browning. [email protected]

Prof. Peter J Goodhew Freng: SuperSTEM(aberration cor-

rected STEM project): www.superstem.dl.ac.uk and http://dbweb.

liv.ac.uk/engdept/content/centres/microscopy/index.html. 6. , HRTEM

EMAT-group Antwerp: interface structure, phase transitions,

nanostructures, http://www.ruca.ua.ac.be/emat

Cockayne Group: amorphous materials; nanostructures; aber-

ration corrected EM; crystalline defects; HREM http://www-em.

materials.ox.ac.uk/people/cockayne/index.html

Z. Zhang : http://www.blem.ac.cn/english/introdution/introdu

tion.htm

D. Smith. ASU. Lawrence Berkeley Laboratory National Center

for Electron Microscopy http://ncem.lbl.gov/frames/center.htm

H. Takahashi: http://www.caret.hokudai.ac.jp/UFML/UFMLindex.

html

K. Urban Group: http://iffwww.iff.kfa-juelich.de/jcem/

M. Ruhle Group:

Howe Group(UVA): Interfaces, phase transformations, nano-

particles, in-situ studies: http://faculty.virginia.edu/teamhowe/

teamhowe.html

Chris Boothroyd: http://www-hrem.msm.cam.ac.uk/~cbb/ http://

www.imre.a-star.edu.sg/personal/getListing_action.asp?strID

=chris-b

K. Takayanagi, Tokyo Inst. Tech., [email protected]

N. Yamamoto, Tokyo Inst. Tech., [email protected]

Y. Tanishiro, Tokyo Inst. Tech., [email protected] H.

Minoda, Tokyo Inst. Tech., [email protected] Y.

Oshima, Tokyo Inst. Tech., [email protected]

How to do HREM, and theory

R. F. Egerton, Electron energy loss spectroscopy in the electron microscope, Plenum, New York, 2nd edition 1996.

M. Tanaka, M. Terauchi, K. Tsuda, K. Saitoh, Convergent beam electron diffraction IV, JEOL Ltd., Tokyo. and earlier volumes. Superb collection of CBED patterns.

J. Spence and J. M. Zuo, Electron microdiffraction, Plenum, New York, 1992.

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D. Shindo, K. Hiraga, High resolution electron microscopy for materials science, Springer, 1998. 7. , Books, special issues of journals, tables. More details, including ISBN numbers and out-of-print books

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tering Kikuchi Diffraction Patterns, IOP, Bristol, 1995. V. Randle and O. Engler, Introduction to Texture Analysis, Gordon and

Breach, Amsterdam, 2000.

U. F. Kocks, C. N. Tom and H.-R. Wenk, Texture and Anisotropy Cambridge, Cambridge, 1998.

Z. L. Wang, Elastic and Inelastic Scattering in Electron Diffraction and Imaging, Plenum, New York, 1995. Introduction to Analytical Electron Microscopy, J. J. Hren, J. I. Goldstein

and D. C. Joy, Editors, Plenum, New York, 1979.

Principles of Analytical Electron Microscopy, D. C. Joy, A. D. Romig, and J. I. Goldstein, Editors, Pleum, New York, 1986.

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J. P. Morniroli, Large-angle convergent beam electron diffraction, Soci-ety of French Microscopists, Paris, 2002.

J. M. Cowley, Diffraction Physics, 3rd Edition, North-Holland, 1990.

E. J. Kirkland, Advanced computing in electron microscopy, Plenum. New York, 1998.

B. Fultz and J. Howe, Transmission Electron Microscopy and Diffracto-metry of Materials, Springer, 2001. 8. Excellent coverage of theory and worked examples.

S. Horiuchi, Fundamentals of HREM, North Holland, 1994. D. L. Dorset, Structural Electron Crystallography, Plenum Kluwer,

Mainly organics, 1997.

D. B. Williams and C. B. Carter, Transmission electron microscopy: A textbook for materials science, Plenum Press, Pedagogically sound introductory text, Indispensible, 1996.

See http://www1.cems.umn.edu/research/carter/book.html

J. C. H. Spence, High Resolution Electron Microscopy, 3rd Edition, Oxford Univ Press, 2003.

전자현미경의 회절원리와 나노구조분석 응용 Polymer Science and Technology Vol. 17,...

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Transcript of 전자현미경의 회절원리와 나노구조분석 응용 Polymer Science and Technology Vol. 17,...