Finishing of Optical Lens using Fixed Diamond Abrasive …ƒ‘连彬-3M TDT...Standardized Effect...

3M China Communication

Finishing of Optical Lens using Fixed Diamond

Abrasive Pads Trizact Diamond Tile (TDT)---3M TDT-高效清洁的无浆料研磨解决方案高效清洁的无浆料研磨解决方案高效清洁的无浆料研磨解决方案高效清洁的无浆料研磨解决方案

Lianbin Zheng, 郑连彬/ Sep.2012

携手创新缔造未来

Overview

� Fixed Abrasive Technology

� 20um and 9um Trizact Diamond Tile(TDT) Performance on

Glass

� Case sharing of TDT on optical lens

2

© 3M 2012. All Rights Reserved.

� Case sharing of TDT on optical lens

Fixed Abrasive(TDT) – Where It Is Used

Broad Market Applications

Glass Hard Disks

LCD Cells

Optical Glass , Crystal Oscillators

Mobile Device Glass Lens

Pad

3

© 3M 2012. All Rights Reserved. 3M Confidential

ApplicationsCrystal Oscillators

Sapphire Substrates for LED

Raw Silicon Wafers

2.6 mm

Engineered Composite Fixed Abrasive

• Organic (crosslinked polymer)

Trizact™ Diamond Tile Fixed Abrasive

4


Potential Advantages

� Provides coolant flow channels

� Provides consistent cut rates

� Pad change time minimal

� Eliminates lap plate rework

� Consistent results batch-to-batch

� 3M Unique Microreplicated Pattern

� Controlled pad - substrate contact

� PSA backed for easy assembly

� Rigid polycarbonate backing

� Uniform content of abrasive throughout life

of product

Features

• Organic (crosslinked polymer)

• Inorganic (vitrified bonded diamond abrasives)

Micro Replication Abrasive

5


Processes for Display Glass Lapping

6


Lapping Technology Comparison

LappingOperation

Abrasive

Process Liquid Lapping Platen / PadType Material

Loose abrasivelapping

Loose(slurry)

Alumina,SiC, B4C,diamond

Abrasive slurry withcorrosion protection

and suspensionadditives

Cast iron platen (possibly serrated with grooves)

7

© 3M 2012 All Rights Reserved.

Pellet lappingFixed

(metal, vitreous,or resin bonded)

DiamondMachining coolant

with corrosionprotection

Cast iron plates with pelletsbonded to the surface

FixedDiamond Tile

Lapping( 3M TDT)

Structured(resin/diamondcomposite pad)

Diamond

Aqueous basedmachining coolant

with corrosionprotection

Any flat or serrated plate with 3MTrizact™ Diamond Tile pad

bonded to the surface with apressure sensitive adhesive

Typical Display Abrasive Finishing

Rough ShapingGlass fabricationCutting to Shape

Intermediate Finishing

8


Shape or Thickness

Surface Finish

Flatness or Parallelism

Removal of Sub-Surface Damage

Performance Attributes

Intermediate FinishingRough or Fine Grinding

PolishingStock PolishFine Polish

Super Polish

3M TrizactTM

Diamond Tile (TDT)

Applications

Incoming inspection

Cutting material Glass thinning

Typical Glass Thinning Process

9


Intensify bythe chemism

Fine PolishingCleaningQC Inspection

Typical Double Sided Grinding Application

10


Double Sided Grinding (Lapping)

GlassDisk

BottomPlaten

Double-sided Lapping Machines• Motor (stationary platens)• Motor (moving platens and sun

A

A

11


Cross-section A-A

Glass Disk

Bottom Platen

Top Platen

Carrier

Applied LoadPlaten

Fixed Abrasive Pads

• Motor (moving platens and sun gear)

• Motor (moving platens, sun, & ring gears)

Lapping Configuration w/TdT

Single-sided

Applied Load

Rotation either motor

Head Oscillates or FixedLower Pressure helps to improve flatness and to reduce breakage

12


TdT

Sub Pad

Platen

Glass Disk

Ring

Carrier

Carrier Film

Rotation either motor or friction driven.

Lapping Carrier with Substrate.

Direction of rotation

Direction of rotation

Single Side Machine

13


Mineral Material: 1200# SiC Slurry 0.5mic CeO Slurry

Grinding Thickness: 0.8mm�0.66mm 0.66mm�0.60mm

Time: 7 minutes 60 minutes Total: 67 minutes

Final PolishingRough Lapping

Slurry Process

Slurry VS TDT: Total Lapping/Polishing Time

14


3M Trizact Diamond Tile

Save 30% lapping time.

Mineral Material: 9mic TDT 0.5mic CeO Slurry

Grinding Thickness: 0.8mm�0.64mm 0.64mm�0.60mm

Time: 3 minutes 45 minutes Total: 48 minutes

Final PolishingRough Lapping

Overall Advantages of Fixed Arasive (TDT) Process� Throughput Increase

� Reduced polishing time due to reduced sub surface damage

� No lap plate re-grinding – less machine down time

� Cleaner process reduces machine down time

� GREEN process: Environmentally Friendly� Significant reduction in slurry waste disposal (only substrate and

15

� Significant reduction in slurry waste disposal (only substrate and coolant – very little abrasive)

� Reduced part cleaning (less water and reduced chemical usage)

� Reduced shipment costs (3M TDT vs. slurry minerals)

� Lower energy (shorter machine cycle times)

� Reduced Machine Maintenance� Reduced slurry distribution system maintenance

� Reduced part carrier wear

Lapping of Soda Lime & Gorilla™ Glass Parts using 9µm EL Trizact™ Diamond Tile

15

20

25R

emov

al R

ate

( µµ µµm

/min

)Grinding test on 9 µm EL Trizact™ Diamond Tile

Ra = 0.33 µm

16


0

5

10

0 20 40 60 80 100 120

Grinding Time (min)

Rem

oval

Rat

e (

Gorilla(TM) Glass

Soda Lime Glass

Ra = 0.37 µm

Pressure = 105 g/cm2 & speed = 30 rpm

-High removal rates-Persistent removal

Lapping Glass Parts with 20 µm Trizact™ Diamond Tile

30

40

50

60

70

Rem

oval

Rat

e (

µµ µµm/m

in)

Ra = 0.73 µm

Ra = 0.70 µm

17


- Stable removal rates- Equivalent surface finish between glass types

0

10

20

30

0 20 40 60 80 100 120

Grinding Time (min)

Rem

oval

Rat

e (

GorillaTM GlassSoda Lime Glass Grinding tests on 20 µm EL Trizact™ Diamond Tile

Pressure = 105 g/cm2 & speed = 30 rpm

Design of Experiments9µm EL Trizact™ Diamond Tile and Soda Lime Glass

Avg. Ra Avg. Rq Max. Rt

70 30 1.2 2.4 0.37 0.48 5.03

Surface Roughness (µµµµm)Plateau

Removal Rates

(µµµµm/min)

Carrier Speed (rpm)

Platen Speed (rpm)

Pressure

(g/cm2)

18


70 30 1.2 2.4 0.37 0.48 5.03

70 90 3.6 10.8 0.29 0.37 3.82

140 60 2.4 16.3 0.34 0.44 4.49

140 60 2.4 17.0 0.34 0.44 4.64

210 30 1.2 13.4 0.40 0.51 5.14

210 90 3.6 46.5 0.34 0.44 4.19

- Wide range of removal rates- Equivalent surface finish between conditions

Surface Roughness from the 9 µm EL DOE on Soda Lime Glass

0.30

0.40

0.50

0.60

Avg

. Ra

or A

vg. R

q (

µµ µµm)

3.0

4.0

5.0

6.0

Max

imum

Rt (

µµ µµm)

Avg. RaAvg. RqMax. Rt

Soda Lime glass ground with 9 um EL Trizact™ Diamond Tile

19


0.00

0.10

0.20

0.30

70-30 70-90 140-60 #1 140-60 #2 210 - 30 210 - 90

Pressure (g/cm 2) - Speed (rpm)

Avg

. Ra

or A

vg. R

q (

0.0

1.0

2.0

3.0

Max

imum

Rt (

2.4 10.8 16.3 17.0 13.4 46.5PlateauRemovalRate (µm/min)

DOE Analysis for 9 EL Trizact™ Diamond Tile and Soda Lime Glass

21014070

30

25

20

15

10

906030

Pressure

Mean

Platen SpeedCorner

Center

Point Type

Main Effects Plot for Average Removal RateData Means

AB

B

A

50403020100

Term

Standardized Effect

12.71

A Pressure

B Platen Speed

Factor Name

Pareto Chart of the Standardized Effects(response is Average Removal Rate, Alpha = 0.05)

a b

c d21014070

30

25

20

15

10

906030

Pressure

Mean

Platen SpeedCorner

Center

Point Type


AB

B

A

50403020100

Term

Standardized Effect

12.71

A Pressure

B Platen Speed

Factor Name


21014070

30

25

20

15

10

906030

Pressure

Mean

Platen SpeedCorner

Center

Point Type


AB

B

A

50403020100

Term

Standardized Effect

12.71

A Pressure

B Platen Speed

Factor Name


a b

c d

20


90

30

21070

Platen Speed

Pressure

16.65

46.50

13.402.40

10.80

Centerpoint

Factorial Point

Cube Plot (data means) for Average Removal Rate

906030

50

40

30

20

10

0

Platen Speed

Mean

70 Corner

140 Center

210 Corner

Pressure Point Type

Interaction Plot for Average Removal RateData Means

c d

90

30

21070

Platen Speed

Pressure

16.65

46.50

13.402.40

10.80

Centerpoint

Factorial Point


906030

50

40

30

20

10

0

Platen Speed

Mean

70 Corner

140 Center

210 Corner

Pressure Point Type


90

30

21070

Platen Speed

Pressure

16.65

46.50

13.402.40

10.80

Centerpoint

Factorial Point


906030

50

40

30

20

10

0

Platen Speed

Mean

70 Corner

140 Center

210 Corner

Pressure Point Type


c d

Statistically Significant Factors-Pressure greatest effect-Larger effect of speed at higher pressure

Design of Experiments20µ EL Trizact Diamond Tile and Gorilla™ Glass

Avg. Ra Avg. Rq Max. Rt46 30 1.2 38.4 0.76 0.98 9.73

Surface Roughness (µµµµm)

Pressure

(g/cm2)

Platen Speed (rpm)

Carrier Speed (rpm)

Avg. Removal

Rates (µµµµm/min)

21


46 30 1.2 38.4 0.76 0.98 9.7346 90 3.6 111.5 0.84 1.08 10.8791 60 2.4 109.0 0.85 1.11 10.8191 60 2.4 112.1 0.79 1.02 8.56137 30 1.2 78.7 0.86 1.10 9.21137 90 3.6 239.3 0.77 1.00 9.31

-Wide range of removal rates- Removal even at low pressure- Equivalent surface finish between conditions

Surface Roughness from the 20 mm EL DOE on Gorilla™ Glass

0.6

0.8

1.0

1.2

Ave

rage

Ra

or R

q (

µµ µµm)

6.0

8.0

10.0

12.0

Max

imum

Rt (

µµ µµm)

Avg. RaAvg. RqMax. Rt

GorillaTM glass ground with 20 µm EL Trizact™ Diamond Tile

22


0.0

0.2

0.4

0.6

46-30 46-90 92-60 #1 92-60 #2 138 - 30 138 - 90

Pressure (g/cm 2) - Platen Speed (rpm)

Ave

rage

Ra

or R

q (

0.0

2.0

4.0

6.0

Max

imum

Rt (

38.4 111.5 109.0 112.1 78.7 239.3AverageRemovalRate (µm/min)

DOE Analysis for 20µ EL Trizact™ Diamond Tile and Gorilla™ Glass

175

150

125

100

75

50

Pressure

Mean

Platen SpeedCorner

Center

Point Type

Main Effects Plot for Avg. RateData Means

AB

A

B

6050403020100

Term

12.71

A Pressure

B P laten Speed

Factor Name

Pareto Chart of the Standardized Effects(response is Avg. Rate, Alpha = 0.05)

a b

175

150

125

100

75

50

Pressure

Mean

Platen SpeedCorner

Center

Point Type


AB

A

B

6050403020100

Term

12.71

A Pressure

B P laten Speed

Factor Name


175

150

125

100

75

50

Pressure

Mean

Platen SpeedCorner

Center

Point Type


AB

A

B

6050403020100

Term

12.71

A Pressure

B P laten Speed

Factor Name


a ba b

23


Statistically SignificantFactors

- Speed greatest effect- Larger effect of speed at higher pressure

1389246

50

906030

90

30

13846

Platen Speed

Pressure

110.55

239.30

78.7038.40

111.50

Centerpoint

Factorial Point

Cube Plot (data means) for Avg. Rate

6050403020100

Standardized Effect

906030

250

200

150

100

50

Platen Speed

Mean

46 Corner

92 Center

138 Corner

Pressure Point Type

Interaction Plot for Avg. RateData Means

c d1389246

50

906030

90

30

13846

Platen Speed

Pressure

110.55

239.30

78.7038.40

111.50

Centerpoint

Factorial Point


6050403020100

Standardized Effect

906030

250

200

150

100

50

Platen Speed

Mean

46 Corner

92 Center

138 Corner

Pressure Point Type


1389246

50

906030

90

30

13846

Platen Speed

Pressure

110.55

239.30

78.7038.40

111.50

Centerpoint

Factorial Point


6050403020100

Standardized Effect

906030

250

200

150

100

50

Platen Speed

Mean

46 Corner

92 Center

138 Corner

Pressure Point Type


c dc d

2mic TDT Applications Investigation

Testing Roughess(um) after 2um TDTRa Rz Rmax

Batch 1 10min lapping 0.08 0.52 0.69

Ra Rz RmaxBatch 3 10min lapping 0.08 0.59 0.76

Ra Rz RmaxBatch 5 10min lapping 0.08 0.5 0.68

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Laser MicroscopeVK-2700 (X500)

2mic 4s-4mic 9mic

20mic 1200# SiC Slurry

4S-4um TDTRa: 0.15um

2um TDTRa: 0.08um

26

4S-4um TDT

2um TDT

客户客户客户客户测试时测试时测试时测试时间间间间测试产品测试产品测试产品测试产品工艺要求工艺要求工艺要求工艺要求

测试结果测试结果测试结果测试结果

G2011年6月

1号

光学玻璃（光盘母盘

,TDT 9mic)

产生牛顿光圈（且不能是马蹄形），光圈

数<30

不仅有良好的光圈出现,且与现有碳化硅工艺相比:平行度改善

一倍,平面度改善两倍

H2011年6月

8号

光学玻璃（投线仪窗口玻璃,TDT

平行度<5"

1.光学性能优于客户现有SLURRY工艺,RR为37.5um/min( 现有工

艺3倍)

TDT在不同光学客户测试

27

H8号玻璃,TDT

9mic)

平行度<5" 艺3倍)2.最后抛光时间从1个半小时减

少到25分钟

K2011年7月

22号

盖板玻璃,光学玻璃(TDT TDT 9mic)

右图为未经抛光,玻璃的牛顿光圈)

光圈形状和数量完全满足客户要求1.平均RR可达现有碳化硅工艺2倍;2可将抛光时间从现有100分

钟减少为40分钟

D2011年8月

30号

光学玻璃(TDT 9mic)单面减薄

1.减薄后表面粗糙度小于0.8微米 2.表面平整度小于

3微米

RR比客户现有工艺提高一倍,且将客户3步减薄工艺简化为1步

TDT减薄


T2011年9月

6号

光学玻璃(石英玻璃,B270玻璃,蓝色滤光片,TDT 9mic)

产生牛顿光圈（且不能是马蹄形），光圈

数<8

1.在石英玻璃上RR为10um/min@40RPM.,B270 上

20um@40RPM,滤光片上15um/min@5RPM,36um/min@10RPM

力2.光学性能良好:平均光圈数3-6

个

M2011年9月

22号光学玻璃

(TDT 9mic)

产生牛顿光圈（不能是马蹄形），光圈数

<6

1.能产生良好的光圈 2.比现有碳化硅工艺减薄效率提高1.5-2

倍以上

转速30RPM RR:2.3um/min@30g/cm2,4.8um/min@50g/cm2,7.2um/min@100g/cm


28

S2011年10月 13号

TDT 45mic 减薄2”蓝宝石

wafer

in@50g/cm2,7.2um/min@100g/cm2,>27.4um/min@150g/cm2 Bow:-0.28um(1A),-0.113um(2A),-0.582(2B) Warp:2.573um(1A),5.886um(1B),1.746um(2A),2.716um(2B) Ra:0.78um(1A),0.685um(1B),0.632um(2A),0.776um(2B) Warp和Bow检测均超过行业标准要求

p2011年10月19号

光学玻璃(TDT 9mic)

光圈形状及数量满足客户要求，客户现有slurry工艺RR=3.7um/min,TDT 9mic lapping RR可达12.5um/min@30RPM Slurry Lapped Glass Ra=0.23μm >TDT lapped Glass Ra=0.12μm 最后抛光时间减少到5小时（客户现有工艺下需10小时）


A2012年2月

16号光学玻璃（TDT 9mic)

测试材质：水晶 Ra:0.15um(TDT lapped )<0.232um(slurry lapped) RR从1.4um/10 circles到7.0um/10circles之间漂移，另外，有部分出现局部雾状B270:相对比较稳定，11um/min左右

P2012年2月

15号

光学玻璃（TDT 9mic)单

面减薄

产生牛顿光圈（不能是马蹄形），光圈数<4

材质：FS7980 Ra:0.166um (TDT lapped)<0.242um(W10 lapped)牛顿环数: 2 (<4)减少20%的减薄时间和 20%抛光时间


29

C2012年2月

17号


面减薄Flatness<2um

测试材质K9: RR:6.5um/min(added 7kg weight)Flatness:2um (customers’spec≦2um)

X2012年3月

5号


面减薄

RR：1)13um/[email protected],40RPM 2)8.5um/[email protected],40RPM 3）11.5um/[email protected],40RPM 推荐客户使用更优化的参数，现已量产

S2012年3月

14号


面减薄

测试材质为青板玻璃，TDT与客户现有slurry工艺对比： 1.任意五点Ra平均值:0.376um(TDT)<0.441um(W10 slurry),TDT磨后的玻璃表面已相当于W10 slurry磨后抛光30分钟2.RR:5um/60rpm,5kg weight © 3M 2012. All Rights Reserved.

Thanks

30

Thanks

� 3M local Technical Service is here to help!

� Contact Lianbin Zheng (Bennie), [email protected]

13702777627


Finishing of Optical Lens using Fixed Diamond Abrasive …ƒ‘连彬-3M TDT...Standardized Effect...

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