Fabrication of Anti-reflection Film with Sub- wavelength Structures Using Roll-to-Roll imprinting...
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Transcript of Fabrication of Anti-reflection Film with Sub- wavelength Structures Using Roll-to-Roll imprinting...
Fabrication of Anti-reflection Film with Sub-wavelength Structures Using Roll-to-Roll imprinting
Reporter Po-Hsiang Wang﹕ (王柏翔 )Advisor : Deng-Maw LU (盧燈茂 ) Cheng-Hsin Chuang (莊承鑫 )
Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan, Taiwan
Date: 2015/05/13
運用滾對滾轉印技術製作具次波長結構之抗反射膜
Outline
2
Introduction
Experimental setup and results
Anti-reflection film measurement
Conclusions
Porous Anodic Alumina Oxide (AAO) Template
R2R Nanoimprinting process
The transmittance and reflectance measurement results
Motivation
Types of Anti-reflection film
Outline
3
Introduction
Experimental setup and results
Anti-reflection film measurement
Conclusions
Porous Anodic Alumina Oxide (AAO) Template
R2R Nanoimprinting process
The transmittance and reflectance measurement results
Motivation
Types of Anti-reflection film
4
Motivation
Reflection
Low contrast
Low contrastDecreased conversion efficiency
Low transmittance
Disadvantages of light reflection
n=1.5
Air n=1 Air n=1
n=1.5
n=1.1~1.4
10%
5
Antireflective coating technology – Multilayer coating
Antireflective structure – Sub-wavelength structure
(SWSs)
Protective filmAntireflection
layerSubstrate with
hard coatingAdhesive layer
SeparatorThe refractive index of multilayer (Ladder)
High-cost facilities
Types of Anti-reflection film
6
Types of Anti-reflection film
Antireflective structure - Sub-wavelength structure (SWSs) Moth eye structures
The reflective index of cylindrical SWSsThe reflective index of cone-shape SWSs
Information source : FINETECH JAPAN 2011
Multilayer coating
The lowest reflection and broadband
Sub-wavelength Structures(SWSs)
The best optical characteristicNanoImprinting processLow-cost
How to achieve broadband and omnidirectional antireflection with low cost
process?
7
Types of Sub-wavelength structures (SWSs)SWSs
AAO Template
Traditional Homemade
Disadvantages• Complex• High-end facilities• Costly• Small size
Advantages Low-cost nano- scale mold Simple process The best optical characteristic Large area
book edited by Xihong Peng, ISBN 978-953-51-0898-6,
Published: December 19, 2012 under CC BY 3.0 license
Outline
8
Introduction
Experimental setup and results
Anti-reflection film measurement
Conclusions
Porous Anodic Alumina Oxide (AAO) Template
R2R Nanoimprinting process
The transmittance and reflectance measurement results
Motivation
Types of Anti-reflection film
9
Idea of Fabricating the Sub-wavelength Structures(SWSs)
Anodization Aluminum Oxide (AAO) Technique
R2R UV curing process Anti-reflection (AR) film
Mold fabrication
Fabrication
Pattern transformation Optical measurement
9
Nano imprinting lithography
10
Experimental setup – Large area anodization process
Facilities for anodization
Advantages
Maintain at the low temperature state
Large area AAO template can be
done
O
I 40V 1A
DC Power supply
11
Experimental – Fabrication of AAO template
Procedures
Pure aluminum substrate
1st anodization process
Removed anodic oxide layer by acid
2nd anodization process
1st anodization process
Applied voltage(V)
Electrolyte (Oxalic acid)
Time(min)
Temperature( )℃
40 0.3M 30 4
2nd anodization process
Applied voltage(V)
Electrolyte(Oxalic acid)
Temperature( )℃
Widening time(min)
40 0.3M 32 10
Anodizing + etchig = 1 time (1st cycle)
Anodizing + etchig = 1 time (2nd cycle)
12
Experimental result – Different 2nd anodization time Top view Widening time 10min, repetition times N=5
Cross section view 297
mm
Ø90 mm
Experimental result – Different 2nd widening time
10min 10、 8、 6、 4、 2min
Outline
14
Introduction
Experimental setup and results
Anti-reflection film measurement
Conclusions
Porous Anodic Alumina Oxide (AAO) Template
R2R Nanoimprinting process
The transmittance and reflectance measurement results
Motivation
Types of Anti-reflection film
Experimental process – R2R Nanoimprinting process
Roll to roll for replicating sub-wavelength on PET
UV light
AAOtemplat
e
Strain Control System
Scraper
Coating system
PET film
UV resin
Pre-heat system
SWSs
Outline
16
Introduction
Experimental setup and results
Anti-reflection film measurement
Conclusions
Porous Anodic Alumina Oxide (AAO) Template
R2R Nanoimprinting process
The transmittance and reflectance measurement results
Motivation
Types of Anti-reflection film
17
Optical measurements results – Transmittance (%)
Transmittance and of the PET plate with/without SWSs
SWSs (aspect ratio 1:2.2)
89%
92%
SWSs (aspect ratio 1:1)
SWSs (aspect ratio 1:0.5)
18
Optical measurements results – Reflectance (%)
Reflectance and of the PET with/without the SWSs
1%
5%4.2%
4.6%
Incident light angles
4.2% 4.2%
6.4%
Outline
19
Introduction
Experimental setup and results
Anti-reflection film measurement
Conclusions
Porous Anodic Alumina Oxide (AAO) Template
R2R Nanoimprinting process
The transmittance and reflectance measurement results
Motivation
Types of Anti-reflection film
20
Conclusions
本實驗成功利用不同的陽極處理時間及擴孔時間循環得到不同深款比的尖錐狀孔洞之陽極氧化鋁模板。
成功控制不同擴孔時間製作具多孔性尖錐狀陽極氧化鋁模板。
成功利用低成本的奈米滾印技術製作大面積具次波長之抗反射光學膜。
此抗反射光學膜穿透率有效提升 3%;反射率從 5%下降至1%。
未來將完成高純度鋁靶材滾筒製作具次波長結構之抗反射光學膜及使用 H-PDMS製做抗反射玻璃。