Development of high brightness and high average power
Transcript of Development of high brightness and high average power
Development of high brightness and high average power picosecond thin disc laser
for short wavelength light sources in HiLASE project (S24)
Taisuke Miura, Michal Chyla, Martin Smrž, Siva Sankar Nagisetty, Patricie Severová,
Ondřej Novák, Pawel Sikocinski, Akira Endo, and Tomáš Mocek
This work benefited from the support of the Czech Republic’s Ministry of Education, Youth and Sports to the HiLASE (CZ.1.05/2.1.00/01.0027) and DPSSLasers (CZ.1.07/2.3.00/20.0143) projects cofinanced from the European Regional Development Fund.
•HiLASE: High average power pulsed LASErs
•European project on strategic development of advanced solid-state laser technologies based on diode pumping (thin-disk laser, multi-slab laser)
•Potential for novel industrial applications using pulsed, high-energy & high-average power DPSSL
The HiLASE Project
Implementation Phase
Demonstration / Technology Transfer
Operation Phase
2011 2012 2013 2014 2015 2016 2017 2011/9 2015/9
Thin Disk-Based High Power Picosecond Laser Beamlines in the HiLASE Project
Beamline-C Beamline-B
0.5 J, 1-2 ps, 1 kHz 5 mJ, 1-2ps, 100 kHz
Beamline-A
0.75 J, <3 ps, 1.73 kHz
Sub-contract
1.3 kW
Main
1 J, 1-2 ps, 120 Hz
100 mJ, 1-2 ps, 1 kHz
Pulse compressor
Pulse compressor
Cryogenic
Slab amplifier
Booster 100 W
120 W 500 W 500 W
Pulse compressor
Regenerative
Amplifier
Pulse stretcher
Oscillator
Pulse compressor
Oscillator
Pulse stretcher
Regenerative
Amplifier
Ring amplifier
Pre
Main
Until Sep. 2015
A B
C
A B
C
Industrial and Medical Applications Using High Energy Picosecond Pulse Based on Thin Disk Technology
EUV/BEUV metrology
Pre-pulse laser for EUV/BEUV
lithography
Laser micromachining
MID-IR pulse source for Bio-medical applications
MID-IR pulse source for LIDT
Soft X-ray source via laser induced plasma or HHG
X-ray source via laser Compton
Water window applications
EUV micro-machining
Present Status of Beamlines Development
45-mJ, 1-kHz
25-W, 100-kHz 50-W, 10-kHz
30-mJ, 1-kHz
50-W, 100-kHz
30 Jul. 2012 30 Oct. 2012
High Repetition Rate Regenerative Amplifier
50-W, 100-kHz, 1.3-nm
Yb doped fiber oscillator (1030nm, 50MHz, 20nm,
40nJ, 5ps)
CW 969&940nm
pump
Beam Line
C
Quantum defects 8.7 % @ 940 nm 5.9 % @ 969 nm
18 nm (FWHM@940 nm)
2.8 nm (FWHM@969 nm)
Wavelength stabilized laser diode by using Volume Bragg Grating (VBG)
Pumping at Zero-Phonon-Line of Yb:YAG
96
9 n
m
Zero
-ph
on
on
-lin
e
Characteristics of CW Output CW output without Pockels cell
90W 132W
107W 55W
35W 45W
940-nm pump 969-nm pump
52W, 100kHz-Regenerative Amplifier
0.5mJ, 100kHz, 1.1 ps
• 2.3nm bandwidth • 32% slope efficiency • 15% optical-optical eficiency • 2.8mm pumpspot (diameter) • 91 roundtrips • 100kHz/0.5mJ after compression • 2.55m cavity length
100 150 200 250 300 350 4000
15
30
45
60
100kHz, 969nm
Outp
ut po
we
r [W
]
Pump power [W]
0
5
10
15
Optical Table
Thin disk
Wavefront sensor
Probe source
(852-nm)
Shortwave pass filer
Experimental Setup of In-situ Thin Disk Deformation Measurement
Precise Measurement of Thin Disk Deformation
Cooling water: Off Cooling water: On
Disk
Cooling water
Displacement less than 40-nm can be detected.
Rela
tive w
avefr
ont
change
Rela
tive w
avefr
ont
change
Cylindrical Deformation of Yb:YAG Thin Disk Under The Lasing Operation
4000
4500
5000
5500
6000
6500
0 50 100 150 200 250 300
0.0 0.8 1.6 2.4 3.2 4.1 4.9
RO
C o
f th
in d
isk
[m
m]
Pump power [W]
Pump Intensity [kW/cm2]
Lasing: HorizontalVertical
Non-lasing: HorizontalVertical lasing
Lasing
Non-lasing
Present Status of Beamlines Development
45-mJ, 1-kHz
25-W, 100-kHz 50-W, 10-kHz
30-mJ, 1-kHz
50-W, 100-kHz
30 Jul. 2012 30 Oct. 2012
High Energy Regenerative Amplifier With pulsed zero-phonon-line pumping
Beam Line
B 45 mJ @ 1 kHz
Yb doped fiber oscillator 1030 nm, FWHM 20-30 nm,
50 MHz, 40 nJ, 3-7 ps
Faraday rotator
BBO Pockels cell
Thin
dis
k la
ser
hea
d
LD 969 nm, 1000 W, VBG,
CW&QCW
Optical isolator
λ/4 λ/2
PBS
PBS TFP
lens lens
HR
HR
HR
HR
HR HR
CAV
CAV
VEX
HR
HR
HR
HR
HR
HR
HR
lens
HR
30 mJ, eff. 12.2 % Pump Pulse
Length 900 µs
Pump Pulse
Length 700 µs
Pump Pulse
Length 500 µs
30 mJ, eff. 15.7 % 24 mJ, eff. 19 %
Pulsed Pumping in 1-kHz Regenerative Amplifier
0.3-0.9 ms
1-ms
~2
60
-W
t Pump pulse shape
Beam pointing stability
Measurement time: 15 min
-3.5
-2.5
-1.5
-0.5
0.5
1.5
2.5
3.5
-3.5 -2.5 -1.5 -0.5 0.5 1.5 2.5 3.5
Ve
rtic
al D
isp
lace
me
nt
[mm
]
Horizontal Displacement [mm]
RMS pointing stability: -horizontal: 3.8-µrad - vertical: 3.3-µrad