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MINIATURIZED FLOW SENSOR WITH PLANAR INTEGRATED SENSOR

STRUCTURESON SEMICIRCULAR SURFACE CHANNELS

Reporter ： Song-En Gong(龔頌恩 )

Adviser ： Cheng-Hsien Liu(劉承賢 )

M. Dijkstra, M.J. de Boer, J.W. Berenschot, T.S.J. Lammerink, R.J. Wiegerink, M. Elwenspoek MESA+ Research Institute, University of Twente, The Netherlands

MEMS 2007, Kobe, Japan, 21-25 January 2007, pp.123-126

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Outline Abstract

Introduction

Fabrication and Result

Conclusion

Abstract

A calorimetric miniaturized flow sensor A linear sensor response measured for DI water

flow from 40 nl min-1 up to 300 nl min-1⋅ ⋅ A versatile technological concept is used to

realize a sensor with thermally-isolated freely-suspended silicon-nitride microchannels

The flow sensor consists of a microchannel with low hydraulic resistance and small total fluid volume

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Introduction

Flow sensor 1

Flow sensor 2

REF: Yingchen Yang,2007

REF: 許志豪 ,2005

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Introduction

Calorimetric flow sensor

REF: N. Sabaté,2003

REF:Seunghyun Kim,2003

Introduction

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REF:Yoshihiro Mizuno

REF:Jun Xie

Coupling with microchannelFor flow rate measure

Fabrication

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Fabrication

5 mm long microchannel has 4.5 nl total volume

Two sensor resistors 40 μm up- and downstream of the heater

Result

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CFDRC simulation

0.25 μl min-1 water flow ⋅fluid is fully heated to a uniform temperature

various water flow rates from 0 μl min-1 up to 2 μl min-1⋅ ⋅

Result

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DI water flow was measured by applying a current of 5 mA to the heater resistor dissipating 1.9 mW

A linear sensor response ΔV having a flow sensitivity of SV = 218 μV / μl min-1⋅

Conclusion

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A linear calorimetric sensor response was measured for DI water flow from 40 nl min-1 up to 300 nl min-1⋅ ⋅

Hydraulic resistance as low as 6.17 kPa / μl min-1 ⋅ for water

A miniaturized calorimetric flow sensor was developed using a versatile surface channel concept

Up to a certain extent, the nonlinear response at higher flow rates can be corrected for by operating the heater at constant temperature

Conclusion

No experiment result shows low hydraulic resistance Signal is small

END

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工程師節快樂

Fluidic interfacing to the microchannel is made possible by directly applying O-rings or capillary tubing connectors on top of the microchannel inlet and outlet imbedded in the substrate surface.

Good thermally isolated channels

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