2012 PMC ()

(04)23599009 515 e9615@mail.pmc.org.tw

2012 PMC ()

PMC*8261

*270*

42

2012 PMC

Machinery Safety DepartmentElectromagnetic Compatibility Department

S E M I Semiconductor Process Equipment Manufacturing System Consulting and Examination

CE Marking Consulting and Examination

Precision Machinery R&D Center

2012 PMC ()

/(CEGB)

IC(SEMI S2)

(ECO)

(FPD LED)

PMC

(94~)()()(LED) 8.5GAMOLED(99~)

tsmcSEMI S2SEMI S2

400

(LED)

RobotAMHS

PMC

2012 PMC ()

(tsmc) SEMI S2

2012 PMC ()

StripperSEMI S2

2012 PMC ()

6

SEMI E6SEMI F5SEMI F14SEMI F15SEMI S1SEMI S3SEMI S6SEMI S7SEMI S8SEMI S10SEMI S12SEMI S13SEMI S14SEMI S22SEMI F47 ANSI/IEEE C95.1

ANSI/RIA R15.06ANSI/ISA S84.01

EN 775EN1050EN1127 IEC 60825-1

IEC 61010-1IEC 61508

DIN V VDE 0801

ISO 10218ISO 13849-1

NFPA 12NFPA 13NFPA 72NFPA 79NFPA 497NFPA 704NFPA 2001

UL 508A

SEMI S2SEMIEN

ANSI

DINUL

ISO

NFPA

IEC

SEMI S2

2012 PMC ()

SEMI S2

Electrical

Safety Circuits

Structural/seismic

Mechanical movement

Robotics and material handlers

Ergonomics

Fire risk and protection

Liquid chemical heating Chemical containment and exposure controlVentilation

Ionizing RadiationNon-ionizing radiationOptical and laser radiation

SEMI S2

2012 PMC ()

SEMI

1. POWER HITESTER

SEMI S2

SEMI S22

ECO

SEMI F47

Tracer gas

LVD

1.2.3.()4.5.

1.

1.2.

1. Sampler and Doser2. Field Gas-Monitor

1.2. RF3.45.6.7.8.

1. 2.

1.2.3.

2012 PMC ()

TAF

2012 PMC

AMHS (Automated Material Handling System)

(Substrate Handlers)

(Cassette Handlers)

() (Industrial Robots (Systems))

(UTV)

AMHS

UTV (Unmanned Transport Vehicle)

2012 PMC

UTV

UTV

Automated Guided Vehicle System (AGV)

Rail Guided Vehicle System (RGV)

Interbay Overhead Transport Vehicle System

Intrabay Overhead Hoist Transport Vehicle(OHT)

1 3

2012 PMC

a)

b)

c)

d)

e)

f)

2012 PMC

:

2012 PMC 14

:()

2012 PMC

()

A 1

B 0.21

C 0.040.2

D 0.020.04

E 0.0020.02

F 0.002

(SEMI S10)1

A1-2

2012 PMC

1.

2.

3.

4.

(SEMI S10)2

2012 PMC

(SEMI S10)3 A1-1

2012 PMC

1

2012 PMC

ISO 13857()

()

a

b

c

-

2012 PMC

(a)

(b)

1000 1200 1400 1600 1800 2000 2200 2400 2500 2700(c)

2700 - - - - - - - - - -2600 900 800 700 600 600 500 400 300 100 -2400 1100 1000 900 800 700 600 400 300 100 -2200 1300 1200 1000 900 800 600 400 300 - -2000 1400 1300 1100 900 800 600 400 - - -1800 1500 1400 1100 900 800 600 - - - -1600 1500 1400 1100 900 800 500 - - - -1400 1500 1400 1100 900 800 - - - - -1200 1500 1400 1100 900 700 - - - - -1000 1500 1400 1000 800 - - - - - -800 1500 1300 900 600 - - - - - -600 1400 1300 800 - - - - - - -400 1400 1200 400 - - - - - - -200 1200 900 - - - - - - - -0 1100 500 -

2012 PMC

2

Interlock

2012 PMC

panel

3

2012 PMC 2013/5/21 23

Safety Mat

Safety Laser Scanner

Safety Light Curtain()

-

2012 PMC

Safety Mat

-

2012 PMC

InterlockGuard Locking Safety-door switch

LockoutTag out

Lockout /Tagout

2012 PMC

EQ

EMS

EMOEMS EMOEMS

EMOEMS EMOEMS

EMO

EMS

STK / Cassette stage

Door2 Door1

Door switch

Door switch

Key SW

HMI

Key SW

EMO

EMS

HMI

Key SW

2012 PMC

AutoTeach

/_

1. message,2. .

2012 PMC

/_

2012 PMC 29

(250 mm/ sec)

AutoTeach

,

BY-PASS

2012 PMC

Teching box

30

12332

2012 PMC

Teching box

2013/5/21 31

1.

2012 PMC

Teching box

a) ; b) ; c); d); e)0 1

;

2013/5/21 32

2.

2012 PMC 33

Robot,

Z

2012 PMC

1.

2. (1)

(2)

3.

2012 PMC

4. (1)()(2) (3) ()

5.

6. (1)

(2)

2012 PMC 2013/5/21 36

a

a

2012 PMC

2013/5/21 37

37

2012 PMC

(04)23599009 515 e9615@mail.pmc.org.tw