반도체용 봉지재료 -...

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한국과학기술정보연구원 BA 089 2003 기술산업정보분석 반도체용 봉지재료 Semiconductor Packaging Materials 이준우, 신흥순, 고병열

Transcript of 반도체용 봉지재료 -...

  • BA 089

    2003

    Semiconductor Packaging Materials

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  • 21

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    2003. 6.

  • i

    1 1

    1. 1

    2. 2

    3. 3

    2 5

    1. 5

    . 5

    . 8

    . EMC 9

    (1) EMC? 9

    (2) EMC 9

    (3) 12

    (4) EMC 13

    (5) EMC 17

    2. EMC 18

    . EMC 18

    . EMC 19

    . 22

    (1) Weighing 22

  • ii

    (2) Mixing 22

    (3) Kneading(Melt Blending) 22

    (4) Cooling 23

    (5) Crushing 23

    (6) Blending 23

    (7) Tableting(or Pelletizing) 24

    (8) Packing and Storage 24

    3. EMC 24

    . 25

    . 25

    . EMC 27

    . Pb-Free EMC 29

    . EMC 30

    (1) 30

    (2) 31

    4. EMC 32

    . 32

    . 33

    3 35

    1. 35

    . 35

    . 37

    . PM 37

    2. 38

    . 38

    . 41

    . 43

  • iii

    3. 46

    . 46

    . 48

    . 49

    4. 50

    . 50

    . 53

    . 54

    5. 55

    . 55

    . 57

    6. 58

    . 58

    . 60

    4 63

    1. 63

    . 63

    . 64

    (1) 64

    (2) 65

    (3) 65

    (4) 66

    2. 66

    . 66

    (1) 66

    (2) EMC 68

  • iv

    . 69

    (1) 69

    (2) 70

    3. 71

    . 71

    (1) 71

    (2) 74

    (3) 75

    (4) 76

    (5) 77

    . 79

    (1) 79

    (2) 81

    (3) 82

    (4) 83

    (5) 83

    (6) 85

    . 86

    . 90

    5 93

    96

  • v

    EMC 10

    17

    32

    36

    36

    40

    (IPC) 44

    DRAM 2003 68

    EMC 72

    EMC (2001 ) 76

    78

    EMC 78

    EMC 79

    EMC 81

    82

    EMC 87

  • vi

    6

    7

    EMC 12

    EMC 14

    EMC 20

    22

    EMC 28

    Pb-Free Technical Road Map 30

    38

    39

    40

    41

    42

    (IPC) 43

    (IPC) 45

    46

    47

    48

    (IPC) 49

    (IPC) 50

    51

    52

    53

    (IPC) 54

    (IPC) 55

  • vii

    56

    57

    58

    59

    60

    61

    64

    EMC () 73

    EMC 74

    EMC 80

    2000 EMC 84

    2001 EMC 84

    EMC 89

    EMC 89

  • 1

    1

    1.

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    , ,

    EMC(Epoxy Molding Compound) . EMC

    , , , , 10

    . , ,

    , . EMC

    .

    EMC

    .

    30% .

    , EMC

    .

  • Semiconductor Packaging Materials2

    .

    EMC

    .

    EMC

    ,

    512M DRAM EMC .

    EMC

    .

    / EMC ,

    EMC .

    , EMC

    ,

    EMC . ,

    bottle neck

    ,

    EMC

    .

    2.

  • 1 3

    ,

    .

    (KISTI)

    EMC

    . EMC ,

    , ,

    R&D

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    , R&D,

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    3.

    EMC

    EMC , EMC

    , ,

    .

    2 (KISTI)

    , EMC

    R&D ,

  • Semiconductor Packaging Materials4

    .

    3 EMC

    (Patent Mapping) . , 20

    , ,

    , EMC

    . EMC

    (www.kisti.re.kr)

    .

    4 EMC

    , . ,

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    Field Survey

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  • 5

    2

    , ,

    , EMC(Epoxy Molding

    Compound) ,

    .

    1.

    .

    IC(Integrated Circuits), LSI(Large Scale IC),

    VLSI(Very Large Scale IC) ,

    , , .

    .

    ,

  • Semiconductor Packaging Materials6

    .

    ,

    .

    ,

    ,

    (Lead

    Frame), (Gold Wire) EMC .

    : (http://www.cii.samsung.co.kr)

    (Packaging)

    (Packaging Materials or Encapsulating Materials)

    (Molding Compound) .

    .

    .

    ,

  • 2 7

    ,

    .

    (Board Mounting) .

    Silicon Chip

    Die Bonding

    Wire Bonding

    Molding

    Lead Trimingand Forming

    Metal Finish on Outer Lead

    AdhesiveLead Frame

    Gold Wire

    Molding Compound

    Solder

    Silicon Chip

    Die Bonding

    Wire Bonding

    Molding

    Lead Trimingand Forming

    Metal Finish on Outer Lead

    AdhesiveLead Frame

    Gold Wire

    Molding Compound

    Solder

    : 1999 10

    . (Epoxy)

    (Ceramics)

    ,

    . PC

  • Semiconductor Packaging Materials8

    .

    . .

    : , , , , ,

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    : , (Tg), , , (

    )

    : , , Soldering

    : ,

    : , , ( ),

    (,

    )

    : , ,

    : (, , ),

    : (, ), ,

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  • 2 9

    ,

    .

    .

    .

    1940 (TR) 1960 IC

    , VLSI .

    (Hermetic

    Packaging)

    (Plastic Packaging) .

    . EMC

    (1) EMC?

    EMC ,

    3 . EMC 3

    / .

    ,

    EMC

  • Semiconductor Packaging Materials10

    Epoxy Molding

    Compound(EMC) .

    (2) EMC

    EMC

    . EMC (Formulation)

    1) 2) , , ,

    .

    1) , Soft Error

    ppb ,

    .

    2) 10 .

  • 2 11

    EMC

    (%)

    , ,

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    85 >

    Ortho-Cresol

    Novolac

    ()

    Bisphenol

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    , ,

    .

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    10~15

    Phenol Novolac

    7~10

    . 1