光電材料及元件製造業 空氣污染管制及排放標準
description
Transcript of 光電材料及元件製造業 空氣污染管制及排放標準
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(VOCs)
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94.03.1494.08.0394.08.26()94.10.1294.11.11()
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---((()()(/((()(((95.1.5)
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()() TFT-LCDTN/STN ():() 1. 2. ():((VOCsHFHCl)) ---
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():( ) ()()() ():() 1.9515 2.9515 ()---()
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() ()() ()() ()() ---()
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1. (1) (2)2.3 (1)() (2)(HF)(HCl) ---()
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VOCs---()
/()/()
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---()
ppm/ppm/ppm/ppm/
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---()
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//---()
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---()
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(module)---()
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() ---()
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() 96.03.31 () ---()
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---()
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VOCs(module)(CEMS) CEMS CEMS---()
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CEMSVOCs(NMHC)VOCsNMHCVOCsCEMS---()
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VOCsHFHClNMHCNIEA A723.72B NIEA A433.71C NIEA A718.10CNIEA A452.70B NIEA A450.71C ---()
VOCs HFHCl
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---()
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---()
pH
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(CEMS)()CEMS---
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---()CEMS
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() ()15 CEMS---()
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()() ()---()
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()---()
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VOCs---()
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CEMS(1316)(11)---
(or or
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---()
30 VOCs30 1CEMSCEMS
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961196.1.1VOCsHFHCl 971961()9611()
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96331VOCsHFHCl96.1.1-3.31(96)CEMSCEMS96.1.5CEMS95.7.597.1.5 ()
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(95.01.05)()
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(VOCs)()VOCs SOxNOx10 VOCs94111096VOCs(VOCs)
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VOCs()(VOCs)
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VOCs VOCsVOCs(VOCs)
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VOCsVOCs12~ 53/VOCs10~96/() VOCs3~8()(VOCs)
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(VOCs)
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()(961)13VOCs ()(981)17VOCs ()()(VOCs)
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()()(VOCs)
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(13) 12A2B3 LC5050% AALG(g/m3)= 10-6 /70/60() 12/20() 70/76()()(VOCs)
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()()VOCsNMHC ()VOCsVOCs 20~30/(12~32/) (53/)(12/)2,000/,VOCs 60/()(VOCs)
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()(VOCs)
5030/(-50) 1,000/30/1.2./3.44.18.75~5025/(-18.75) 1,000/25/7.5~18.7522/(-7.5) 1,000/22/1~7.520/(-1) 1,000/20/12000/2000/1,2-1,1-1,1,1-60/1./
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SOxNOxVOCs200/ 98()(VOCs)
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()(VOCs)
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()(VOCs)
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VOCsVOCs()(VOCs)
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()(VOCs)
VOCsVOCsNIEA A716.10CNIEA A717.10CVOCsVOCs()VOCsVOCs880%
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17~25/Kg50/30/3630/50/29.9/VOCs1.Cobb-Douglas & ()2.()(30/)20~25/
%25%50%75%90%95%(/kg)9,8912,0142923617
1000 Nm3()(mg/Nm3)-RTORTO100 / 2006.63 / 10.47.13 / 8.414.1 / 13.026.8 / 25.826.2 / 48.950021.212.010.522.7117
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VOCsVOCs
VOCs(/) [VOCs(/)]-[VOCs(/)]-VOCs(/)-VOCs(/)-VOCs(/)(VOCs) [()VOCs] (VOCs) (VOCs) [()VOCs] (VOCs) VOCsVOCsVOCs
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(/)(1-) (VOCs) (/)(M3/)(/)(/) (1-)()(/)(/) (1-)()(/)(%) ()(1-) ()/(/)(M3/)(1-)(VOCs)