Vacuum Valve Overhaul

Pressure Control Valve Repair

Slit Valves Valve Repair

Isolation Valve Repair

Vacuum Valve Overhaul

TEL Unity Gate Valve Repair

TEL P/N :3M80-000227-12

Model: UXG846H-KL-04

VAT Pendulum (APC) Valve Repair

Use machine : Novellus Vector Home

P/N:04-146459 Home

Valve control Open Angle

Simulator

H P iti t t C l t t Open position confirmHome Position test Cycle test Open position confirm

Pendulum Valve Components

Valve Assembly Body Motor AssemblyMotor Assembly

Pendulum Unit Control Board Heater Actuator Seals

Pendulum Plate Isolation set Pendulum Shaft Close set

VAT Pendulum Isolation Valve RepairRepair details

1. Problem check : Function and leak test before repair2. Disassembly & Check : Disassembly all of valve and check each components one by one3. Clean , Replace damaged & all seals and bearings4. Assemblyy5. Leak Test : Vacuum leak , Isolation Leak and CDA Leak test6. Function test : Control simulate verify and cycle test7 Final check packing : heater test and packing Control7. Final check packing : heater test and packing Control

Simulator

Leak Test Simulate Control & Cycle test

Leak Test

Leak Test ByComplete Leak Leak Test By RGA

Complete Leak Test

Function Test

Valve operation and functions test

V-TEX Rollcam Slit Valve O h lOverhaul

Slit ValveSlit Valve

VETEX Gate Valve Repair

Repair Details :Repair Details : 1. Replace damaged Partsa Valve Bellow (Welding Bellowa. Valve Bellow (Welding Bellow

or Formed Bellow)b. Cylinder Assemblyc. Bearingsd. Tube Adapter2. Recover all of malfunctions3. Clean & Check all of

tcomponents4. Function Test5 L k T t5. Leak Test

Load-lock Slit Valve Repair

Use Machine : Novellus Vector , 300mm

Description : Gate Valve Assembly , L-Type

Novellus P/N : 63-136020-01

Valves Overhaul

200 cylinder slit ValveVAT Gate Valve O/H

200 cylinder slit Valve

MKS Th ttl lMKS Throttle valve Overhaul

SMC Gate Valve O/H 300 Cylinder slit Valve O/H

MKS Throttle Valve Overhaul

Repair Model :Repair Model :All MKS Type 253 and 683B Throttle Valve

Model : 683B-23421 253B-15186

Normal Defect Condition : ASMNormal Defect Condition :

1. Pressure can’t servo or servo unstable2. Valve jammed3 V l l t l

ASM

3. Valve lose control4. Valve can’t reach initial position

ASM E-10

Producer RTPNovellusProducer SE

MKS Throttle Valve Overhaul

Gear assembly Slip PlateGear damaged Slip Plate damaged

Slip Plate Damaged Damaged

Motor Gear & Bushing damaged

Gear Bushing Damaged

Gear Box Damaged

Shaft Damaged

Vacuum Valve Repair

MKS Valve MKS Valve Nor-Cal Valve

IKC Valve SMC Valve MDC ValveIKC Valve SMC Valve MDC Valve

Valve Overhaul , SCV

Valve Assembly, SCV Valve (VEP Valve) )

Angle type In-Line Type

Cylinder assembly Valve Housing assemblyCylinder assembly Valve Housing assembly

Valve Overhaul , SCV,

CylinderCylinder & Spring Housing Piston

Shaft & Bellow Screw Fix Screws Internal Heater & T/CShaft & Bellow Screw Fix Screws Internal Heater & T/C

Valve Overhaul , SCV,

Valve Bellow &Valve Bellow & Cylinder Seal Internal T/C

Disassembly

Position Sensor Thermal Switch l Repair Details pReplace Parts : Valve Bellow , Seals , Cylinder Seals , Thermal Switch Repair Parts (Option ) : Internal T/C , Internal Heater, External T/C & Heater, Position Sensor

p ( p ) , , ,

Valve Overhaul , SCV

Test :Test : a. Vacuum Leak Testb. Operation Testc Position Sensor Testc. Position Sensor Testd. T/C Teste. Heater Function Test

SMC Isolation Valve Repair

SMC Isolation Valve Repair

Size form NW16 to ISO160

Repair details :

a. Replace of bellow, Cylinder seal ,O-ring

b. Leak Test

c. Function test cycle 100 times.

SMC Isolation Valve Repairp

Repair Details : 1. Cylinder Repairy pa. Replace sealb. Replace Housingp g

2. Valve Repaira. Replace Valve Bellow

b. Valve Housing Repair

3. Testa. Function Testb. Leak Test

PS SMC Valve can be modify to higher Pumping speedPS. SMC Valve can be modify to higher Pumping speed

Pressure Control Valve Repair

Use Machine : Novellus Vector , 300mm

Description : Valve, S65, DN100, VAT

Novellus P/N : 60-106440-00

SMC Isolation Valve Repair

SMC Isolation Valve Repair

Size form NW16 to ISO160

Repair details :

a. Replace of bellow, Cylinder seal ,O-ring

b. Leak Test

c. Function test cycle 100 times.

Valve Modify For AMAT Producer

Before Modify

OpenCloseResultMKS Valve:1)V l b d 1071)Valve body 107 mm2)Housing 38 mm3)Open時, 只開 10 mm

MKS Valve (Modified):

4)只開21% ((10/47.4)x 100%)

( )1)Valve body 135 mm2)Housing 108 mm3)Open時 全開40mm3)Open時, 全開40mm4)全開84%

Aft M difAfter Modify

Nor-Cal IPV Valve RepairpNor-Cal Isolation Pendulum Valve

R iRepair

1. Replace all of mechanism partsp p

2. Replace all of damaged pats

3. Function & Leak test

Nor-Cal IPV Valve Repairp

Nor-Cal IPV Valve Repair

Extra Hard stop for test

Function and cycle test

stop for test

Function and cycle test

Leak Test

VAT Gate Valve Repair

VAT Gate Valve Repairp

DN63 ~DN300

VAT Valves Repair

Pressure Control Gate Valve Gate Valve Slit Valve