EBARA's energy-saving dry vacuum pumps are used for many different applications

Model ESRModel ESR a re designed for general evacuation in diverse applications, featuring low energy consumption.

EBARA PRECISION MACHINERY BUSINESS

・ Ideal configuration especially for corrosive gas application (Niresist material)・ Small footprint, light weight・ No shaft-seal N2 required: Model ESR20N (Applicable to None- corrosive application)・ Sensitive control with latest microprocessor technology・ Easy replacement of LCD controller during pump operation・ Lower operating cost・ Enhanced pump RPM control function: Wide Controllable range, Idling mode・ Digital & analog signal available: For flexible interface with process tools・ Advanced data storage capability・ N2 warning setting adjustable on LCD controller・ SEMI-S2/CE marking/NRTL available

Specification Table

Model ESR i s suitable for a wide range of applications from light-duty processes like load locks and SEM to corrosive process. EBARA has recognized the need for energy efficiency, small footprint, and weight in a stand-alone roots dry vacuum pump.

*1 Model "N": All Model ESR use Niresist iron *2 At maximum pumping speed and standard N2 purge flow rate.

DRY VACUUM PUMPS

L/min1,300～2,000

3,0004,000～8,500

4,000～10,000

10,000～20,000

30,000 46,000

Pa 2.0 0.53 0.67 0.5 0.2 0.2 0.5 0.13 0.2 0.2

NW40 NW50 NW100 ISO160

NW40

kW 0.7 1.7 1.0 1.1 2.9 3.1

L/min 2～8 3.5～8 2～5 2～8 2～5 2～8 3.5～8

℃ Max. 30

Pa•m3/s19～22(0)

19～22(3.4)

17～21(4)

19～22(3.4)

17～21(4)

19～22(3.4)

kV 7.0 8.0

kg 190 170 180

ConnectionGas Inlet

Gas Outlet

Approx.Power at Ultimate Pressure

CoolingWater

Flow rate

Temperature

N2 GasApprox. Flow rate(N2-0 Mode)

Utility

Power Supply

Power capacity

Weight

Model*1

Pumping Speed

Ultimate Pressure*2

Phase/Volt/Freq.

200V Model

400V Model

ESR20N

ESR30

ESR30N

ESR80W

ESR80WN

ESR100WN

ESR200W

ESR200WN

ESR300W(N)

ESR500W(N)

3Phase/200V/50Hz3Phase/200-220V/60Hz

3Phase/380-400V/50Hz3Phase/380-440V/60Hz

Features

40

90 210 250 390 500

10.6 12.3

Model ◯◯◯ in this site is our model code

EBARA PRECISION MACHINERY BUSINESS

EBARA PRECISION MACHINERY BUSINESS

Performance Curves

EBARA PRECISION MACHINERY BUSINESS

EBARA PRECISION MACHINERY BUSINESS

Performance Curves