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TRNG I HC BCH KHOA H NIVIN C KH

BO CO BI TP LN THIT K H THNG VI C IN TTHIT K MOTOR QUAY S DNG HIU NG TNH IN RNG LC ti:Gio vin hng dn:TS. PHM XUN KHINhm sinh vin thc hin:TRN TRNG C (C)BI TUN ANHTRN TRUNG THH Ni, 3/2014

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NI DUNG BO COTNG QUAN V CNG NGH MEMS XUT CU TRCTHIT K V TNH TON CH TO V GIA CNG CHI TITKT LUN

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TNG QUAN V CNG NGH MEMSt (actuator).Sensor tcSensor gia tcSensor vn tc gcSensor nhitActuator nhitActuator p inActuator tnh inActuator hp kimSensorActuator Khi nim v vi c in t - MEMSH thng vi c in t-MEMS (Micro-Electro-Mechanical Systems) l h thng tch hp cc phn t c kh, cm bin, b kch hot, cc cu kin in t v c sn xut bng cng ngh micro.

Hai dng sn phm chnh ca cng ngh MEMS l cm bin (sensor) v b kch hot (actuator).SensorSensor lcSensor vn tcSensor gia tcSensor nhitActuatorActuator nhitActuator inActuator tnh inActuator hp kim

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ng dng ca MEMSTNG QUAN V CNG NGH MEMS

MEMSin t gia dngTronglnh vcysinhTrong giaothng

Trong v tr, qun s

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MT S C CU S DNG HIU NG TNH IN RNG LCNguyn l hot ng:S dng ngun ng hc chnh l lc c to ra t c cu tnh in rng lc.

u im:Nguyn l hot ng n gin

Nhc im:L xo c th mt n hi

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MT S C CU S DNG HIU NG TNH IN RNG LC

Nguyn l hot ng:Da trn hiu ng tnh in rng lc

u im:Nhc im:Nguyn l hot ng n gin

Chi ph ch to cao

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MT S C CU S DNG HIU NG TNH IN RNG LC

Nguyn l hot ng:Hai u cn c ni vi h thng Actuator tnh in rng lc v chuyn ng qua li lm cho hai rng gn trn cn n khp vi h thng bnh rng c trn bnh rng do mi ln cn chuyn ng qua li lm bnh rng pha trong dch i 1 bc rng. Nu tng tn s chuyn ng ca cn ln nhanh hn s lm cho bnh rng trong chuyn ng nhanh hn ko theo bnh rng ngoi chuyn ng

u im:Kt cu n ginNguyn l hot ng n ginNhc im:S n khp lin tc d gy mn rng

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Cu to chi tit:C cu dn ng stator v roto

Bn c cu hm s dng hiu ng nhit

Thanh di trt

Bnh rng XUT CU TRC

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XUT CU TRCCu to chi tit: C cu dn ng stator v roto

Phn stator

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XUT CU TRCCu to chi tit: C cu dn ng stator v roto

Phn roto

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XUT CU TRC

C cu hm s dng hiu ng nhit Cu to chi tit:

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XUT CU TRC

Thanh di trt Cu to chi tit:

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XUT CU TRC

Nguyn l hot ng:Da trn hiu ng tnh in rng lc, ta bin i t nng lng in thnh lc c hc to thnh m men quay cho actuator ny.Ta cp in cho cc cp bn cc l tri du nhau, v thanh gt chnh l mt b phn mang in khng i to lc ht, y gip lm quay bnh rng.

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THIT K V TNH TONL thuyt tnh in

in dung ca bn t song song:Lc tip tuyn trn bn cc di ng:Nhn xt Fn>Ft do y0>go

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THIT K V TNH TON

Tnh chuyn v ca c cu hm

dn di ca dm:Chuyn v ca dm y :

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THIT K V TNH TON

Tnh ton chi titLc tip tuyn gia hai bn t:

Nhng y l kiu rng lc nn ta c lc tip tuyn:

Lc tnh in tc dng vo thanh gt chnh

Momen m lc in tc dng ln 1 thanh gt chnh

Tng momen ln 4 thanh gt chnh:

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THIT K V TNH TON

Momen thc t m bnh rng nhn c:

Lc thc t m bnh rng nhn c

Ti mt v tr, lc thc t m bnh rng nhn c:Vi vng rng trong:

Vi vng rng ngoi:

Khi thanh gt di chuyn theo chiu lm quay bnh rng

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THIT K V TNH TON

Khi thanh gt di chuyn theo chiu khng lm quay bnh rng

a gt c th trt trn b mt rng cc th:

Lc php tuyn trong c cu mi:Tnh ng knh a trt D>Dgh.Chn D=20m (theo sc bn vt liu silicon)

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CH TO V GIA CNG CHI TIT

Gia cng rng lcGia cng bnh rngChun b lp mt nTin hnh qu trnh quang khcTin hnh n mn bng HFChi tit

Quy trnh ch to:Chun b tm nn wafer SOI

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KT LUNQua thi gian tm hiu v cc lnh vc vi c in t chng em c nhng hiu bit nht nh v ngnh m mnh ang theo hc, thng qua bi tp ln chng em t c kt mt s kt qu nht nh: xut tng thit k c mt c cu micro motorTm hiu v cc phng gia cng MEMSBt u tnh ton c c cu v m phng trn phn mm solidTuy nhin bn cnh nhng g t c chng em vn cn nhiu thiu stKh nng ng dng c cu vo thc t cn hn chVic tnh ton cc kch thc cn hn ch cha tht chnh xc nh hng pht trin:Tip tc hon thin c cuTi u ha

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TI LIU THAM KHO1) Phuc Hong Pham, Dzung Viet Dao, Satoshi Amaya, Ryoji Kitada and Susumu Sugiyama, Straight Movement of Micro Containers Based on Ratchet Mechanisms and Electrostatic Comb-Drive Actuators, Journal of Micromechanics and Microengineering (SCI), Vol. 16, No. 12 (2006), pp 2532-2538.2) Phuc Hong Pham, Dzung Viet Dao and Susumu Sugiyama, Micro Transportation System (MTS) with Large Movement of Containers Driven by Electrostatic Comb-Drive Actuators, Journal of Micromechanics and Microengineering(SCI), Vol. 17, No. 10 (2007), pp 2125-2131.3) Phuc Hong Pham, Lam Bao Dang and Hung Ngoc Vu, Micro Robot System with Moving Micro-car Driven by Electrostatic Comb-Drive Actuators, Microsystem Technologies (SCI), Vol. 16, No. 4 (2010), pp 505-510.4) Motor tuyn tnh hai chiu dn ng bng b kch hot nhit (Nguyn Tun Khoa1, ng Bo Lm1, Nguyn nh Hng2, Phm Hng Phc).5) C hc k k thut- Gs. Sanh6) Vt liu hc (Nh xut bn khoa hc k thut)7) http://mems.sandia.gov/gallery/movies_optical_encoders_and_shutters.html

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