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Alcatel601EDRIE(DeepReactiveIonEtcher)OperationManual

Description:

TheAlcatel601EutilizestheBoschprocesstoprovidedeepetchesintosiliconsubstrates.Withpropersubstratepreparationandhandlingthesystemcancompletelyetchthroughthesilicon.Currentconfigurationisfor100mmsiliconwaferswithasingleflat.AfterasubstratehasbeenmanuallyloadedintotheLoadlockalltransferandprocessingiscompletedunderautomaticcomputercontrol.

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Safety:1. Beforeoperatingthistool,usersmustbetrainedandcertifiedbyLabstaff.2. MakesurethatasubstrateisloadedandtheVacuumLoadlocklidisdownbefore

startinganyprocess3. ARedAlarmstatuslightindicatesthesystemhas/hadaconditionthatmaynot

allowprocessing.Theusershouldusecautionuntilthecauseofthealarmisdetermined

4. IftheAlarmwillnotremainoffafteracknowledgingcontactthestaffatthephonenumberlistedbelow.

5. IfGreenOnstatusindicatorisoffandRedstopstatusindicatorisondonotattempttostart.DiscontinueusingthesystemandcontacttheNCNCstaff

EmergencyMachineOff(EMO)

UsetheEMOButtononlyifthereisasafetyhazardorserioussystemfailure.Ifthereiswateronthefloorbetweenyouandthesystemleaveandcontactthelabstaff.

1. PushRedEMO(EmergencyMachineOff)button2. CallNCNCstaff

a. LabPhone 2‐9831

EMOBUTTON

(GUI)Graphical

UserInterfacecandisplay

detailedSystem

Status

ControlButtonsandStatus

Indicators

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SystemOperation

InitialSystemChecks:

1. Checkthelogbooktoverifysystemcondition.IfsystemisdownandwasnotnotedintheNCNCmailpleasesendanE‐Mailupdatingthestaffandusergroup.

2. Notethealarmstatus.3. Verifythatsystemchambervacuumisinthex.x‐6mBarrange.4. Loadlockshouldbevented.5. OpenLoadlockandcheckforsubstrate.

GUI(GraphicalUserInterface)

1. ProvidesVideodisplayofControlComputerSensorandStatusinformation,functionwindowsanddatainputfields.

OpenLoadlock

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PrepareforEtching

1. SelectUserButtonusingTrackballandleftclickkey.(seeAppendix)

2. UsingTrackballandleftclickkeySelectLogintoopenLoginWindow.

UserButton

LoginButton

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3. UsingTrackballandKeyboardEnteryourusernameandpasswordthenclickOK.

4. UseTrackballtoopenAlarmscreenifactive.5. RecordanyalarmothertheHeaterstandbymessageintheLogbook.6. PleasenotifyDanHaskell4‐6587ofallalarmsotherthanHeaterstandby.7. AcknowledgetheAlarm(s).8. WaitoneminuteifAlarmremainsoff,systemcanbeusedforprocess.9. IfAlarmreturns,Logoffandplaceamachinedownnotificationonthesystem.

RecordthealarmmessagetextinthelogbookandE‐mailNCNCthatthesystemisdown.

10. IfnoactivealarmsarepresentopentheLoadlockandplacesubstratewithoneflatorientedtothelocatorscrews.

SubstrateLoaded

UserName

Password

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11. CloseLoadlockLidandproceed.

SelectRecipe

1. UsingTrackballselectGO!Process.

ClosedLoadlock

ProcessSelectionWindowButton

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2. UsingTrackballSelectthedropdownlist.3. ScrollthroughthelistandclickondesiredProcess.

4. EnableDatalogging“recommended”.

EtchSubstrate

1. SelectGO!RunbuttontostarttheProcess.2. ThescreenwillchangetotheProcessControldisplay.

BlueIndicatesSelectedProcess

Dataloggingshowndisabled

Run/StartButton

RecipeStepsofSelectedProcess

DropDownList

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3. SystemwillpumpdowntheLoadlockthentransportthewaferintotheProcessChamber.

4. MonitorHeliumflowandtemperatureforatleast2minutesbeforeleaving.Heliummayriseto10sccmatthebeginningofthestepbutshouldsettletobelow3sccminthefirstminuteofflow.HeliumFlowsover3sccmcancauseprocessshifts.ThesystemshouldgenerateaWarningandanAlarmthatshouldhaltprocessiftheHeliumflowsexceed10sccm.

5. ObservetheProcessControlscreenforatleast2minutesbeforeleavingthesystem.6. VerifythatsensordisplaysarereachingrecipeSetpointsandnoAlarmshave

occurred.

Processelapsedtime

HeliumFlowSensorValue

CurrentStepField

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AfterEtchisComplete

1. WhenallprocessstepsarecompletethesystemwillplacethesubstrateintheLoadlock.TheLoadlockisventedtoAtmospherethenanEndofprocesswindowwillbedisplayed.

2. OpenLoadlockandremovesubstrate.3. Inspectthesubstratefordamage.Ifanybreakageorpiecesaremissingdiscontinue

usingthesystem.Logoffandplaceasystemdownnotificationonthesystem.SendE‐mailnotificationtoNCNCgivingthesystemstatus.

4. CloseEndofProcessWindow.5. IflastwaferLogoff.6. CloseLoadlocklidbeforeleavingsystem.7. UpdateLogbook.

CloseEndofprocessbutton

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APPENDIX:

Trackball:

1. M1isequivalenttoLeftMouseButton.2. M3isequivalenttoRightMouseButton.3. RollingTrackballshouldmoveindicatorarrowonscreen.

FrontControlPanel:

1. StopButton(RedIndicator)lampshouldbeoff.Donotpressbutton,unusedduringnormaloperation.

2. StartButton(greenindicator)shouldbeonduringnormaloperation.IfGreenindicatorisoffdonotattempttorestartsystem.

3. EmergencyStopPushbutton.OnlyusedinEmergenciesremovesElectricalpowerfromthesystem.

4. AlarmIndicator(Red)activewhensystemisnotreadytorunaprocess.

M1

M3

Trackball

EmergencyStop

Pushbutton

StartButton(GreenIndicator)

StopButton(RedIndicator)

AlarmIndicator

(red)

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UserInterfaceSystemScreen:

1. RedindicatesInactiveorClosed.GreenindicatesActiveorOpen.2. TimeandDatefieldsareactiveonallpages.3. LoadlockPressuredisplay.OnlyattempttoopenwhendisplayreadsAtm.4. SourceRFStatusfielddisplayspowerdeliveredvs.powerreflected.5. ProcessChamberHighVacuumSensordisplayssystembasepressure.During

processtheassociatedIsolationValvewillcloseandthesensordisplaygoestooff.

LoadlockPressure

TimeandDateDisplay

SourceRF

StatusDisplay

ProcessChamberHigh

VacuumSensorDisplay

ProcessChamberHighVacuum

SensorIsolationValve

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6. LoadlockhasnoLidclosedorwaferpresentsensors.7. ManometerSensorFielddisplaysChamberpressureduringProcesssteps.8. VATValvecanisolatethechamberormovetocomputercontrolledpositionto

varychamberpressure.9. LoadlockTurboPumpStatusDisplayGreenindicatesonandatoperatingspeed.

ThistypicallywillgoRedbrieflyduringLoadlockpumpdown.10. LoadlockRoughingPumpGreenindicatesonandproperpressurelevelto

supporttheTurboPump.11. SubstrateHolderRFStatusfielddisplayspowerdeliveredvs.powerreflected

andBiasvoltagedeveloped.

VATValve

LoadlockRoughing

PumpStatusDisplay

LoadlockTurboPumpStatusDisplay

SubstrateHolderRF

PowerStatusField

LoadlockManometerSensor

Field

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12. WaferIcondisplayslastexpectedplacementposition.WhensystemisinidlemodeWaferIconisshowninLoadlock.

13. ProcessTurboPumpstatusDisplayshouldremainGreen.DuringnormaloperationRedisanAlarmcondition.

14. TurboNitrogenValveisonlyopenedusedduringmaintenance.15. ProcessTurboPumpIsolationvalveshouldremainopen(Green)duringnormal

operation.16. Processchamberroughingpumpprovidesroughvacuumpumpingduring

systemstartup.TypicallythechamberroughpumpprovidesexhaustvacuumfortheProcessTurbopump.

WaferIconshownasYellowRectangle

ProcessChamberTurboPumpStatusDisplay

ProcessChamberTurboPumpIsolationValve

ProcessChamberRoughingPumpStatus

Display

TurboNitrogenValve

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17. LowerSubstrateHolderVacuumValvecontrolsVacuumsupplytoLowerSubstrateHolderAssembly

18. HeVacuumValveactivatestopumpHeliumfrombacksideoftheSubstratebeforeclampisreleased.

19. ProcessChamberTurboBypassValveonlyusedduringmaintenance.20. SubstrateHolderTemperatureSensorDisplay21. HeSupplyValvedeliverstheMassFlowControlleroutputtotheBacksideofthe

substrate

HeSupply

Valve

LowerSubstrateHolder

VacuumValve

HeVacuumValve

ProcessChamber

TurboBypassValve

SubstrateHolder

TemperatureDisplay

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22. LoadlockN2valve.SuppliesN2duringLoadlockventtoAtmosphere.23. LoadlockVacuumValveusedtopumpLoadlockforsubstrateVacuumtransport.

Valveisclosed(red)whenLoadingorUnloadingLoadlockatatmosphericpressure.

24. HeMFC(MassFlowController)displaysHeflow.IfHeflowreadingsexceed3sccmexpectprocessshifts.Flowsabove10sccmshouldgenerateawarningoralarm

25. HePressuresensor.NormalpressureshouldmatchrecipeSetpointof1.0E‐1mBar.

LoadlockN2Valve

LoadlockVacuumValve

HeMFC(MassFlowController)Flowdisplay

HePressureSensorDisplay

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26. MachineOperatingMode,shouldalwaysbeinLocal.27. ProcessLibraryisassignedtouserlistedhere.28. UserLogDisplayliststheUserthatispresentlyloggedin.29. CommunicationstatusdisplaysstatusofthelinkbetweentheUserinterfaceand

the(PLC)SystemControlComputer

Machine

OperatingMode

ProcessLibrary

UserLog

Display

Communication

Status

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ProcessStatusScreen:

1. PumpingStatusField.TrianglesshouldremainGreenindicatingpumpsareonduringprocesssteps.

2. Elementarymoves.RedindicatestheRobothascompletedthesubstratemovementindicatedbythetext

3. ProcessStatusField.YellowTriangleindicatesactivesystemcontroltomatchRecipestepvalues

4. ThermalizationStatusField.YellowTriangleindicatesactivesystemcontroltomatchRecipeSetpoints.ThermalizationSetpointsremainactiveafterstepiscompleteuntilfinishofprocessrecipe.

5. TemporizationStatusField.RedTriangleindicatesthestepDuration(timerhascompleted).

PumpingStatusElementaryMovesStatus

ProcessStatusField

TemporizationStatusField

ThermalizationStatusField

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6. ProcessPressure.TurquoiseFieldindicatessensorvalue.ThispressureisaresultoftheVATvalvepositionandtheamountofgasflowingintotheprocesschamber.ExpecttoseevaryingvaluesduringtheBoschEtchProcess.

7. RecipeGasFlowSetpointsaredisplayedinYellowfields.8. GasFlowSensorDisplaysareTurquoise.9. RFreflectedpowerdisplay.Boschprocesschangesvariablesfasterthansystem

canrespond.Varyinglevelsarenormal.10. SubstrateVoltage.ThisvoltagevarieswithSubstrate,RFpower,Chamber

pressureandGas

ProcessPressure

RecipeGasFlowSetpoints

GasFlowSensorDisplay

SubstrateVoltage

RFreflectedpowers

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11. StopProcessbutton.Abortsallprocessstepsthenremoveswaferimmediatelyfromthechamber

12. Step.HaltsstepinprogressandstartsnextstepintheRecipe.13. Step(resume).ResumesastopduetoanAlarm.Resumesastepthatwasbeing

held.14. Step(hold).TherecipeprocesstimeorDurationSetpointisignored.Thesystem

willcontinueruntheactivestepwithnoregardtotimeelapsed.Becarefulifthisbuttonispushedduringaprocessstepdon’tleavesystemunattended,itwillcontinuetoetch.

Step

(hold)

Step

(resume)

StepStop

Process