Post on 19-Mar-2016
description
2LED, LD, HEMT
LPE, HVPE, MOVPE, MBE
LEDGaAsAlGaAsGaPGaAsPAlGaInPGaInNGaAsGaAsGaPGaAs, GaPGaAsAl2O3LDInGaAsPAlGaAsAlGaInPGaInN(780nm)(650nm)(405nm)InPGaAsGaAsAl2O3
(1)(2)
(2)(3)(2),(3)()
6
1:Padyn/cm2
x,y,z
1dyn/cm2 = dyncm / cm3 = erg / cm3
zy
(epitaxial layer)(substrate)
epi subhomo-epitaxy GaAs/GaAs, GaP/GaP, Si/Si
episubhetero-epitaxy InGaAs/GaAs, GaN/Al2O3, SiGe/Si
500mm10mm
1epi.sub.epi.sub.aepi > asubaepi < asubasubasubaepiaepi
1asubaaasub
GaAsInPaRT[]5.65335.8687a[K-1]6.910-64.510-6